Scanning probe microscopy apparatus and techniques
AssigneeThe Trustees of the University of Pennsylvania
InventorsRui Shao, Sergei V. Kalinin, Dawn A. Bonnell
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Abstract
Scanning probe techniques based on the measurement of impedance spectroscopy using a conductive an SPM tip is provided and applied to the study of local transport properties, especially at a grain boundary. The contributions of the grain boundaries and tip-surface interaction can be distinguished based on the analysis of the equivalent circuit. The technique is applicable for both the spatially resolved study of transport mechanisms of polycrystalline semiconductors and the tip-surface contact quality. A piezoresponse force microscopy technique yields quantitative information about local non-linear dielectric properties and higher order electromechanical coupled of ferroelectrics.
Claims9
A method of assessing properties of a sample's grain boundaries, comprising the steps of:
- (a) providing a scanning force microscope probe having a conductive probe tip on a cantilever,
- (b) disposing the tip on a point on a surface of the sample,
- (c) applying a modulated voltage to the probe tip;
- and
- (d) providing an electrode in contact with the sample to enable acquiring of impedance modulus and phase, whereby information relating to grain boundaries may be obtained.
Dependencies are inferred from the claim text.