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US 7,078,650 B2Granted
Micro-machining employing multiple independently focused and independently steered beams
AssigneeOrbotech Ltd.
InventorsAbraham Gross, Zvi Kotler, Eliezer Lipman, Dan Alon
Life of this patent
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Abstract
A system for delivering energy to a substrate includes a laser energy source providing at least two laser beams, wherein each of the beams is steered to an independently selectable location on a target, and is independently focused onto the target.
Claims26
A method for delivering laser energy to a workpiece, comprising:
- providing at least two laser beams that are pulsed;
- selectably steering each said at least two laser beams to independently selectable locations on a workpiece;
- and
- independently focusing each said at least two laser beams onto said workpiece, said focusing comprising:
- focusing a first laser beam to a first location on said workpiece during a first pulse;
- and
- repositioning a redundant laser beam focusing optical module during said first pulse to a position required to focus a subsequent pulsed laser beam to a subsequent selectable location on said workpiece, said subsequent pulsed laser beam to be output during a subsequent pulse.
4 more elements
A method for manufacturing an electrical circuit substrate, comprising:
- delivering laser energy to an electrical circuit substrate, said delivering including:
- providing at least two laser beams that are pulsed;
- selectably steering each said at least two laser beams to independently selectable locations on an electrical circuit substrate;
- and
- independently focusing each said at least two laser beams onto said electrical circuit substrate, said focusing comprising:
- focusing a first laser beam onto a fist location on said electrical circuit substrate during a first pulse
- repositioning a redundant laser beam focusing optical module during said first pulse to a position required to focus a subsequent pulsed laser beam onto a subsequent selectable location on said electrical circuit, said subsequent pulsed laser beam to be output during a subsequent pulse;
- and
- performing at least one additional electrical circuit manufacturing operation on said electrical circuit substrate.
6 more elements
Dependencies are inferred from the claim text.