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US 7,077,943 B2Granted
Barium titanate film synthesizing process
AssigneeNational Chunghsing University
InventorsFu-Hsing Lu, Chu-Tsun Wu
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Abstract
A new technique to synthesize barium titanate (BaTiO3) on homogeneous substrates (titanium) or heterogeneous substrates (silicon wafers, metal, glass, ceramics, polymers, other metals, etc.) is disclosed to include a first step to deposit a titanium film on a substrate by sputtering, and a second step to synthesize barium titanate film with uniformly dispersed spherical particles on the titanium-coated substrate in a electrolyte containing barium ions by electrochemically anodic oxidation.
Claims12
A barium titanate film synthesizing process comprising the steps of:
- (a) coating a titanium film on the surface of a substrate, said titanium film having a grain size which is in nano-scale;
- and
- (b) synthesizing a barium titanate film on the titanium-coated substrate in an electrolyte containing barium ions by electrochemically anodic oxidation.
Dependencies are inferred from the claim text.