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US 7,077,935 B2Granted
O2 and H2O barrier material
AssigneeGeneral Atomics
InventorsJohn P. Ziegler, John R. Piner
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AssigneeGeneral Atomics
InventorsJohn P. Ziegler, John R. Piner
Estimating the term…
O2 and H2O barrier materials suitable for the protection of LCDs and flexible OLEDs are fabricated on a polymer substrate using dense inorganic barrier layers. A polymer surface having a low surface roughness has an inorganic layer of aluminum or silicon oxides deposited thereupon using ion-assisted vacuum deposition with an argon ion gun, which treatment surprisingly provides a smoothing effect on the surface of the polymer. By pretreatment of prefabricated polymeric film with ion-gun enhanced plasma in the presence of oxygen, commercially available heat-stabilized PET and PEN films can be directly employed as substrates. Protective polymer layers are optionally coated upon the thin inorganic barrier layer.
A method of making a flexible composite barrier material to prevent the passage of water and oxygen to an electronic display device which incorporates organic material, said method comprising the steps of:
A method of making a flexible barrier material that is effective to prevent the passage of water and oxygen to a device which incorporates organic display material, said method comprising the steps of:
A method of making a flexible barrier material to prevent the passage of water and oxygen to a device which incorporates organic display material, said method comprising the steps of:
Dependencies are inferred from the claim text.