Systems and methods for actuating end effectors to condition polishing pads used for polishing microfeature workpieces

A system including features for conditioning microfeature workpiece polishing media, the system comprising:

• an end effector having a head coupled to a first shaft, the head having a conditioning surface configured to condition a microfeature workpiece polishing medium;
• a motor having a second shaft positioned at least proximate to the first shaft;
• and
• a drive link coupled between the first and the second shaft to rotate the end effector, wherein the drive link includes a first gear element attached to the first shaftand a second gear element attached to the second shaft, and wherein the first gear element is meshed with the second gear element.

A system including features for conditioning polishing media for polishing microfeature workpieces, the system comprising:

• a rotatable end effector having a conditioning surface configured to condition a microfeature workpiece polishing medium, wherein the end effector includes a first shaft carrying a first gear;
• a motor, having a second shaft carrying a second gear;
• wherein the second gear is directly engaged with the first gear;
• and
• a forcing device coupled to the end effector, the forcing device including a first generally rigid member and a second generally rigid member operatively coupled to the first generally rigid member, the second generally rigid member being coupled to the end effector and being movable relative to the first generally rigid member, and first generally rigid member being movable relative to the second generally rigid member, to apply a force to the end effector that is at least approximately normal to the conditioning surface, at least one of the generally rigid members being rotatable with the end effector.

A system including features for conditioning microfeature workpiece polishing media, the system comprising:

• a rotatable end effector rotatable around a first rotation axis and having a conditioning surface configured to condition a microfeature workpiece polishing medium;
• a rotatable arm rotatable around a second rotation axis proximate to a first end of the rotatable arm and carrying the rotatable end effector proximate to a second end of the rotatable arm;
• and
• a driver coupled to the end effector to rotate the end effector, the driver including:
• an electric motor carried by the rotatable arm, the motor having a shaft that is not parallel with either the first or the second rotation axis;
• and
• a drive link coupled between the motor and the end effector.