US 7,077,388 B2 · Bubbler for substrate processing

Abstract

A vaporization chamber for a substrate processing system includes a main body, a cover member and a transition member. The main body is made of aluminum and defines a first inner surface, which defines, at least in part, a cavity. The cover member is also made of aluminum. The cover member defines a second inner surface, which also defines, at least in part, the cavity. The cover member includes a carrier gas cover inlet, a liquid source cover inlet, a source cover outlet which extends from a first outer surface through the cover member to the second inner surface. The transition member is made of stainless steel and has a transition outer surface and a transition inner surface. The transition inner surface is aluminum cladded. The cover member includes a carrier gas cover inlet, a liquid source cover inlet, a source cover outlet which extend from a first outer surface through the cover member to second inner surface. The transition inner surface and the cover outer surface are welded together.

Claims14

Dependent claims

A substrate processing system for processing a substrate, comprising:

a carrier gas source;
a liquid source container;
a reactor;
a vaporization chamber comprising a body that forms a first inner surface that defines at least in part a cavity, the cavity being in communication with the carrier gas source through a gas line, the liquid source container through a supply line and the reactor through a feed line, the first inner surface being made from a first material that is non-ferric;
and
a transition piece having a first surface made from the first material and a second surface made from a second material that is ferric;
wherein a connection between the vaporization chamber and at least one of the gas line, the supply line and the feed line extends from the first surface to the second surface and through the body of the vaporization chamber to the cavity, the connection including a connector that is attached to the second surface of the transition piece.

4 more elements

Dependencies are inferred from the claim text.

Bubbler for substrate processing

Life of this patent

Bubbler for substrate processing

Life of this patent

Abstract

Claims14