Sensor for determining the state of parameters on mechanical components while using amorphous carbon layers having piezoresistive properties

A method of measuring an actual state variable at a stressed surface of a mechanical component, the method comprising the steps of:

• providing an amorphous carbon piezoeresistive layer having piezoresistive properties within the layer and disposed on the stressed surface;
• providing a measuring device coupled to the amorphous carbon layer by an electrical contact;
• and
• measuring the actual state variable.

A sensor arrangement for measuring actual state variables of a stressed surface of a mechanical component, comprising:

• an amorphous carbon layer overlaying the surface of the mechanical component;
• and
• an electrical contact coupled to the amorphous carbon layer and to a measuring device;
• wherein the amorphous carbon layer has piezoresistive properties therein.

A method of using an amorphous carbon layer with piezoresistive properties as a sensor for measuring actual state variables at a stressed surface of mechanical components, comprising the steps of:

• providing the amorphous carbon layer with piezoresistive properties on the stressed surface, the amorphous carbon layer containing a piezoresistive material;
• selecting the amorphous carbon layer from a group of hydrogenated carbon layers (a-C:H) and non-hydrogenated carbon layers (i-c);
• providing a measuring device coupled to the amorphous carbon layer by an electrical contact;
• and
• using the amorphous carbon layer as a sensor.