Gas collecting device, test head and IC device testing apparatus
AssigneeAdvantest Corporation
InventorKoei Nishiura
Life of this patent
Estimating the term…
Abstract
A heating element cooling cover 5 for covering IC devices 44 mounted on a substrate 4, wherein a coolant is circulated to be able to contact the IC devices 44, and a groove 54 (bypath) is provided for an air and the coolant to flow from a gas accumulation part where gas accumulation is liable to be generated inside the heat element cooling cover 5 to a position where the circulating coolant comes downstream of the gas accumulation portion, so that gas accumulation can be effectively removed as a result that the air in the gas accumulation part can pass through the bypath.
Claims8
A gas collecting device provided with a coolant container for containing a coolant and circulating said coolant to make it contact a heating element, for collecting a gas existing in an internal space of said coolant container, comprising:
- a gas collecting mechanism for drawing the gas existing in the internal space of said coolant container to discharge to outside of said coolant container, wherein
- said gas collecting mechanism is provided with a drawing path,
- one end of said drawing path opens at a gas accumulation part generated in the internal space of said coolant container,
- the other end of said drawing path opens at a discharge portion of the coolant in said coolant container, and
- said drawing path is a bypath formed to be a groove shape on said coolant container.
The gas collecting device provided with a coolant container for containing a coolant and circulating said coolant to make it container, comprising:
- a gas collecting mechanism for drawing the gas existing in the internal space of said coolant container to discharge to outside of said coolant container, wherein
- said gas collecting mechanism is provided with a drawing path,
- one end of said drawing path opens at a gas accumulation part generated in the internal space of said coolant container,
- the other end of said drawing path opens at a discharge portion of the coolant in said coolant container,
- said coolant container is arranged to be in a plurality of directions, and positions of said gas accumulation part change along with said plurality of directions, and
- said drawing paths are arranged corresponding to respective positions of said moving gas accumulation part.
A gas collecting device provided with a coolant container for containing a coolant and circulating said coolant to make it contact a heating element, for collecting a gas existing in an internal space of said coolant container, comprising:
- a gas collecting mechanism for drawing the gas existing in the internal space of said coolant container to discharge to outside of said coolant container, wherein
- said heating element is a plurality of heating elements mounted on a substrate;
- and
- said coolant container is a heating clement cooling cover attached in an airtight way to one surface or both surfaces of said substrate to cover said heating elements.
A gas collecting device provided with a coolant container for containing a coolant and circulating said coolant to make it contact a plurality of heating elements, for collecting a gas existing in an internal space of said coolant container, comprising:
- a gas collecting mechanism for drawing the gas existing in the internal space of said coolant container to discharge to outside of said coolant container, wherein
- the plurality of heating elements are arranged on a substrate;
- said coolant container is provided with partition walls;
- and
- said partition walls are provided to form a flow route for said coolant to flow corresponding to an arrangement of said plurality of heating elements.
Dependencies are inferred from the claim text.