US 7,070,833 B2 · Method for chemical vapor deposition of silicon on to substrates for use in corrosive and vacuum environments

Abstract

A method of passivating the surface of a substrate to protect the surface against corrosion, the surface effects on a vacuum environment, or both. The substrate surface is placed in a treatment environment and is first dehydrated and then the environment is evacuated. A silicon hydride gas is introduced into the treatment environment, which may be heated prior to the introduction of the gas. The substrate and silicon hydride gas contained therein are heated, if the treatment environment was not already heated prior to the introduction of the gas and pressurized to decompose the gas. A layer of silicon is deposited on the substrate surface. The duration of the silicon depositing step is controlled to prevent the formation of silicon dust in the treatment environment. The substrate is then cooled and held at a cooled temperature to optimize surface conditions for subsequent depositions, and the treatment environment is purged with an inert gas to remove the silicon hydride gas. The substrate is cycled through the silicon depositing step until the surface of the substrate is covered with a layer of silicon. The treatment environment is then evacuated and the substrate cooled to room temperature.

Claims23

Dependent claims

A method of passivating a surface of a substrate to protect the surface against corrosion or the undesirable effects on a vacuum atmosphere, comprising the steps of:

a) placing the substrate in an environment for treatment;
b) dehydrating a surface of the substrate;
c) evacuating the environment;
d) introducing a silicon hydride gas into the treatment environment to contact the substrate;
e) heating the silicon hydride gas prior to, during or after the introduction of silicon hydride gas into the treatment environment;
f) pressurizing the silicon hydride gas in the treatment environment;
g) depositing a layer of silicon on a surface of the substrate;
h) controlling one or more of the duration of the silicon depositing step, the pressure of the silicon hydride gas, and the presence of contaminants on the substrate surface to prevent the formation of silicon dust;
i) cooling the substrate to a lower temperature and maintaining the substrate at a lower temperature for a period of time;
j) purging the treatment environment with an inert gas to remove the silicon hydride gas;
k) cycling the substrate through steps c) through j) for at least one cycle;
l) evacuating the treatment environment;
and,
m) cooling the substrate to room temperature.

11 more elements

A method of passivating a surface of a substrate to protect the surface against corrosion or the undesirable effects on a vacuum atmosphere, comprising the steps of:

a) placing the substrate in an environment for treatment;
b) dehydrating the surface of the substrate;
c) evacuating the environment;
d) introducing a silicon hydride gas into the treatment environment to contact the substrate;
e) heating the silicon hydride gas in the treatment environment;
f) pressurizing the silicon hydride gas in the treatment environment;
g) depositing a layer of silicon on a surface of the substrate;
h) controlling one or more of the duration of the silicon depositing step, the pressure of the silicon hydride gas, and the presence of contaminants on the substrate surface to prevent the formation of silicon dust;
i) cooling the substrate to a lower temperature and maintaining the substrate at a lower temperature for a period of time;
j) purging the treatment environment with an inert gas to remove the silicon hydride gas;
k) cycling the substrate through steps c) through j) for at least one cycle;
l) evacuating the treatment environment;
and,
m) cooling the substrate to room temperature;
wherein said lower temperature to which the substrate is cooled in step i) is from about 50° C. to 400° C.;
said period of time at which the substrate is maintained at a lower temperature is from about 5 to 100 minutes;
said dehydration step comprises heating the substrate to a temperature in the range of from about 300° C. to 600° C. for a duration of from about 10 to 240 minutes;
including the step of heating the substrate in an inert gas or in a vacuum;
said silicon hydride gas being selected from the group consisting of SiH4 and SinHn+2;
said silicon hydride gas being heated to a temperature approximately equal to the gas's decomposition temperature;
said silicon hydride gas being heated to a temperature in the range of from about 300° C. to 600° C.;
said silicon hydride gas being pressurized to a pressure in the range of from about 0.1 torr to 2500 torr;
and
said layer of silicon being deposited on the substrate surface for a period in the range of from about 1 to 480 minutes.

21 more elements

A method of passivating a surface of a substrate to protect the surface against corrosion or the undesirable effects on a vacuum atmosphere, comprising the steps of:

a) placing the substrate in an environment for treatment;
b) dehydrating the surface of the substrate;
c) evacuating the environment;
d) introducing a silicon hydride gas into the treatment environment to contact the substrate;
e) heating the silicon hydride gas in the treatment environment;
f) pressurizing the silicon hydride gas in the treatment environment;
g) depositing a layer of silicon on a surface of the substrate;
h) controlling one or more of the duration of the silicon depositing step, the pressure of the silicon hydride gas, and the presence of contaminants on the substrate surface to prevent the formation of silicon dust;
i) cooling the substrate to a lower temperature and maintaining the substrate at a lower temperature for a period of time;
j) purging the treatment environment with an inert gas to remove the silicon hydride gas;
k) cycling the substrate through steps c) through j) for at least one cycle;
l) evacuating the treatment environment;
and,
m) cooling the substrate to room temperature;
wherein said lower temperature to which the substrate is cooled in step i) is from about 50° C. to 400° C.;
said period of time at which the substrate is maintained at a lower temperature is from about 5 to 100 minutes;
said dehydration step comprises heating the substrate to a temperature in the range of from about 300° C. to 600° C. for a duration of from about 10 to 240 minutes;
including the step of heating the substrate in an inert gas or in a vacuum;
said silicon hydride gas being selected from the group consisting of SiH4 and SinHn+2;
said silicon hydride gas being heated to a temperature approximately equal to the gas's decomposition temperature;
said silicon hydride gas being heated to a temperature in the range of from about 300° C. to 600° C.;
said silicon hydride gas being pressurized to a pressure in the range of from about 1×10−7 torr to 2500;
and
said layer of silicon being deposited on the substrate surface for a period in the range of from about 1 to 480 minutes.

21 more elements

A method of passivating a surface of a substrate to protect the surface against corrosion or the undesirable effects on a vacuum atmosphere, comprising the steps of:

a) placing the substrate in an environment for treatment;
b) dehydrating the surface of the substrate;
c) evacuating the environment;
d) introducing a silicon hydride gas into the treatment environment to contact the substrate;
e) heating the silicon hydride gas in the treatment environment;
f) pressurizing the silicon hydride gas in the treatment environment;
g) depositing a layer of silicon on a surface of the substrate;
h) controlling one or more of the duration of the silicon depositing step, the pressure of the silicon hydride gas, and the presence of contaminants on the substrate surface to prevent the formation of silicon dust;
i) cooling the substrate to a lower temperature and maintaining the substrate at a lower temperature for a period of time;
j) purging the treatment environment with an inert gas to remove the silicon hydride gas;
k) cycling the substrate through steps c) through j) for at least one cycle;
l) evacuating the treatment environment;
and,
m) cooling the substrate to room temperature;
wherein said lower temperature to which the substrate is cooled in step i) is from about 50° C. to 400° C.;
said period of time at which the substrate is maintained at a lower temperature is from about 5 to 100 minutes;
said dehydration step comprises heating the substrate to a temperature in the range of from about 300° C. to 600° C. for a duration of from about 10 to 240 minutes;
including the step of heating the substrate in an inert gas or in a vacuum;
said silicon hydride gas being selected from the group consisting of SiH4 and SinHn+n;
said silicon hydride gas being heated to a temperature approximately equal to the gas's decomposition temperature;
said silicon hydride gas being heated to a temperature in the range of from about 300° C. to 600° C.;
said silicon hydride gas being pressurized to a pressure in the range of from about 100 torr to 250 torr;
and
said layer of silicon being deposited on the substrate surface for a period in the range of from about 1 to 480 minutes.

21 more elements

Dependencies are inferred from the claim text.

Method for chemical vapor deposition of silicon on to substrates for use in corrosive and vacuum environments

Life of this patent

Method for chemical vapor deposition of silicon on to substrates for use in corrosive and vacuum environments

Life of this patent

Abstract

Claims23