Optical proximity correction method using weighted priorities

A method of enhancing the effectiveness of optical proximity correction on a device, the method comprising:

• providing an initial device design layout having a plurality of areas;
• identifying areas within the plurality of areas of the initial device design layout that are critical to device performance;
• assigning priority values to each area within the plurality of areas prior to performing optical proximity correction on the device, wherein the areas identified as critical are given a higher priority value than areas designated as non-critical;
• generating layers of the initial device design layout which contain priority value information regarding critical areas of each layer;
• and
• imposing more precise accuracy requirements to high priority value areas than low priority value areas.

A method of improving symmetry between functional groups of a semiconductor device which undergo optical proximity correction, the method comprising:

• providing an initial device design layout containing functionality groups having a plurality of areas;
• identifying areas within the plurality of areas of a functional group in the initial device design layout that require symmetry, wherein the areas requiring symmetry are designated as critical areas;
• assigning priority values to each area within the plurality of areas prior to performing optical proximity correction on the device, wherein the areas identified as critical are given a higher priority value than areas designated as non-critical;
• and
• imposing more precise accuracy requirements to high priority value areas than low priority value areas.

A data processing system for enhancing the effectiveness of optical proximity correction, comprising:

• means for providing an initial device design layout having a plurality of areas;
• means for identifying areas within the plurality of areas of the initial device design layout that are critical to device performance;
• means for assigning priority values to each area within the plurality of areas prior to performing optical proximity correction on the device, wherein the areas identified as critical are given a higher priority value than areas designated as non-critical;
• and
• means for imposing more precise accuracy requirements to high priority value areas than low priority value areas.

A computer program product in a computer readable medium for enhancing the effectiveness of optical proximity correction, comprising:

• first instructions for providing an initial device design layout having a plurality of areas;
• second instructions for identifying areas within the plurality of areas of the initial device design layout that are critical to device performance;
• third instructions for assigning priority values to each area within the plurality of areas prior to performing optical proximity correction on the device, wherein the areas identified as critical are given a higher priority value than areas designated as non-critical;
• and
• fourth instructions for imposing more precise accuracy requirements to high priority value areas than low priority value areas.