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US 7,068,348 B2Granted
Holding mechanism in exposure apparatus, and device manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorShinichi Hara
Life of this patent
Estimating the term…
Abstract
Disclosed is a holding system and an exposure apparatus having the same, wherein deformation of an optical member resulting from its thermal expansion and causing degradation of imaging performance can be reduced to assure desired imaging performance. The holding system for holding an optical member includes a barrel for at least partially surrounding the optical member and/or a heat source, an average of radiation coefficient of an inside surface of the barrel is not less than 0.8.
Claims11
A holding system for holding an optical member placed in a substantially vacuum ambience, comprising:
- a barrel for at least partially surrounding the optical member and a heat source;
- and
- a film formed on an inside surface of said barrel and including a material having a radiation coefficient larger than that of a material of said barrel;
- wherein an average of radiation coefficient of an inside surface of the barrel is not less than 0.8.
1 more element
An exposure apparatus, comprising:
- an optical system including a plurality of optical elements, for directing light from a light source to a member to be exposed;
- a barrel for at least partially surrounding the plurality of optical elements;
- a film formed on an inside surface of said barrel and including a material having a radiation coefficient larger than that of a material of said barrel;
- and
- a cooling mechanism for cooling at least one of the plurality of optical elements, wherein said cooling mechanism includes (i) a radiation member disposed opposed to an optical member and a heat source without contact thereto, (ii) a Peltier device being in contact, at on end, with the radiation member, for adjusting a temperature of said radiation member, and (iii) a heat radiating block being in contact with the other end of said Peltier device,
- wherein an average of radiation coefficient of an inside surface of the barrel is not less than 0.8, and wherein an average of radiation coefficient of the heat radiating block is not greater than 0.2.
3 more elements
Dependencies are inferred from the claim text.