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AssigneeDiscera, Inc.
InventorsXiangxiang Huang, James D. MacDonald, Wan-Thai Hsu
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A method for modifying the resonance frequency of a micro-mechanical resonator, and resonators on which the method is practiced. A packaged resonator is trimmed by directing electromagnetic energy to the resonator through a transparent portion of the package. The removal of mass (by the energy) affects the resonance frequency of the resonator in a predictable manner. In some embodiments, the energy is sourced from a femtosecond laser. In some variations of the illustrative embodiment, the amount of mass to be removed is determined as a function of its location on the resonator. A mass-trimming map is developed that identifies a plurality of potential mass-trimming sites on the resonator. A site can be classified as a fine-tuning site or a coarse-tuning site as a function of the degree to which mass removal at those sites affects the resonance frequency. The sites can also be characterized as a function of their position relative to features of the resonator (e.g., nodal lines, etc.). Based on a differential between the measured and desired resonance frequency of the resonator, and expressions that relate resonance frequency to location-dependent mass, actual sites for mass removal are selected from among of the plurality of potential mass-trimming sites.
A method comprising:
A method for trimming a resonance frequency of a micro-mechanical resonant element, the method comprising removing mass from a plurality of sites on said micro-mechanical resonant element, wherein an amount of said mass that is removed at said pluarity of sites creates a divot that is less than about 1 micron in width and about 1 micron in depth, and wherein said plurality of sites define a symmetrical arrangement with respect to a center of mass of said resonant element.
A method for trimming a resonance frequency of a micro-mechanical resonant element, the method comprising:
A method for trimming a resonance frequency of a micro-mechanical resonant element, the method comprising removing mass using a femtosecond laser, wherein said mass is removed from a plurality of sites on said micro-mechanical resonant element, and wherein said plurality of sites define a symmetrical arrangement with respect to a center of mass of said resonant element.
A method for trimming a resonance frequency of a micro-mechanical resonant element, the method comprising removing mass from a plurality of sites on said micro-mechanical resonant element, wherein said plurality of sites define a symmetrical arrangement with respect to a center of mass of said resonant element, and said symmetrical arrangement is based on an expression that relates resonance frequency of said resonant element to location-dependent mass.
An article comprising:
A method comprising changing a resonance frequency and a quality factor of a micro-mechanical resonator by removing a quantity of mass from said micro-mechanical resonator, wherein said quantity of mass removed is determined as a function of a position of said mass on said micro-mechanical resonator, and wherein said quantity of mass is removed is asymmetrically located relative to a center of said micro-mechanical resonator.
Dependencies are inferred from the claim text.