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US 7,065,900 B2Granted
Docking-type system and method for transferring and treating substrate
AssigneeDMS Co., Ltd.
InventorsYong-Seok Park, Kyung-Chul Kim, Sok-Joo Lee
Life of this patent
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Abstract
A substrate transferring/treating system includes a substrate stacking base, a substrate transferring member for receiving/transferring the substrate from/to the base, a substrate cleaning/drying device for cleaning and drying the substrate transferred from the substrate transferring member, and a substrate treating device for treating the substrate that is cleaned and dried by the substrate cleaning/drying device and transferred by the substrate transferring member.
Claims10
A substrate transferring and treating system comprising:
- a substrate stacking base;
- and
- a substrate transferring member that transfers a substrate from said base to a substrate cleaning/drying device, and the same substrate transferring member transfers said substrate from said cleaning/drying device to a substrate treating device;
- wherein said substrate cleaning/drying device cleans and dries the substrate and
- wherein said substrate treating device treats the substrate.
2 more elements
A substrate treating method comprising the steps of:
- unloading the substrate out of a substrate stacking base with a substrate transferring member;
- transferring the substrate to a substrate cleaning/drying device with the same substrate transferring member;
- and
- transferring the substrate from said substrate cleaning/drying device to a substrate treating device with the same substrate transferring member,
- wherein the cleaning/drying device is connected in a docking type system to the substrate treating device.
2 more elements
Dependencies are inferred from the claim text.