Pattern correction method of semiconductor device

A pattern correction method executed by a computer, the method comprising:

• executing a first correction for a plurality of first edges meeting a condition for optical proximity effect among edges constituting a designed pattern, by calculating a plurality of first correction values, each having a value conforming to the condition and correcting the plurality of first edges with the calculated first correction values;
• executing a second correction for a plurality of second edges which do not meet the condition, by correcting one side of the second edge to be coincident with one of the first correction values of a first edge adjacent to the one side of the second edge;
• and correcting the remaining side of the second edge to be coincident with another one of the first correction values of a first edge adjacent to the other side of the second edge;
• and
• connecting the corrected one side and the other side of the second edge with a line segment.

A pattern correction method executed by a computer, the method comprising:

• executing a first correction for one or a plurality of first edges meeting a condition for optical proximity effect among edges constituting a designed patterned, by calculating a plurality of first correction values, each having a value conforming to the condition and correction the one or the plurality of first edges with the calculated first correction values;
• executing a second correction for one or a plurality of second edges which does not meet the condition by one method selected from the following methods:
• (1) a first method comprising:
• correcting the second edge by making it be coincident with the one of the first correction value of a first edge adjacent to one side of the second edge;
• and
• connecting an end portion of the other side of the corrected second edge and another corrected first edge adjacent to the other side of the corrected second edge, by a line segment;
• (2) a second method comprising:
• correcting one side of the second edge to be coincident with one of the correction values of a first edge adjacent to the one side of the second edge and correcting the remaining side of the second edge to be coincident with another one of the first correction values of a first edge adjacent to the other side of the second edge;
• and
• connecting the corrected one side and the other side of the second edge with a line segment;
• or
• (3) a third method, comprising:
• correcting the second edge so that the corrected second edges are parallel to the second edges and that one end point of the corrected second edges is coincident with a corrected first edge adjacent to the end point of the one of the second edges;
• extending another corrected first edge adjacent to another one of the second edges, so that the extended corrected first edge intersects the another one of the corrected second edges;
• wherein after the second correction, the pattern correction method further comprising:
• deciding whether or not a pattern after the second correction meets a design rule;
• and
• executing a third correction for the one or the plurality of second edges by use of another method selected from methods (1) to (3) that is different from the method selected in the second correction, when the pattern after the second correction does not meet the design rule.

A computer program product configured to be executed by a computer, the program product comprising:

• executing a first correction for one or a plurality of first edges meeting a condition for optical proximity effect among the edges constituting a designed pattern, by calculating a plurality of first correction values, each having a value conforming to the condition and correcting the one or the plurality of first edges with the calculated correction values;
• executing a second correction for a second edge which does not meet the condition, by correcting the second edge with a second correction value, the second correction value being equal to one of the first correction values, which corresponds to one of the first edges adjacent to the second edge;
• and
• connecting the corrected one of the first edges and the corrected second edge by a line segment.