Apparatus and method for inspecting semiconductor device
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorSatoru Nishimura
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Abstract
An image of the shape of a semiconductor wafer is displayed on a display apparatus for displaying an inspection result of a semiconductor device, and a different color or pattern is displayed for each inspection result as display information indicating the inspection result of a semiconductor device in a region corresponding to the semiconductor device on the image of the semiconductor wafer.
Claims7
A semiconductor device inspecting apparatus, comprising:
- an apparatus for identifying a semiconductor wafer and an in-plane position of a semiconductor device in a semiconductor wafer that comprises a plurality of semiconductor devices including an analog circuit,
- an apparatus for inspecting an electrical characteristic of such a semiconductor device by inputting a linear value to each of such a plurality of semiconductor devices,
- an apparatus for storing inspection result information of the linear value of such an electrical characteristic,
- an inspection result processor for converting inspection result information into display information, and
- a display apparatus for displaying display information, wherein
- the display apparatus is for displaying (1) an image of a shape of a semiconductor wafer, and (2) a different color or pattern for each inspection result information of the linear value in a region corresponding to a semiconductor device on the image of a semiconductor wafer as display information indicating an inspection result of such semiconductor device.
A semiconductor device inspecting method for displaying inspection result information about an electrical characteristic of a semiconductor device on a semiconductor wafer that comprises a plurality of semiconductor devices including an analog circuit, the method comprising:
- inputting a linear value to each of such a plurality of semiconductor devices and inspecting the electrical characteristic thereof,
- displaying an image of a shape of a semiconductor wafer, and
- displaying, as display information indicating an inspection result of a semiconductor device, a different color or pattern for each inspection result information of the linear value in a region corresponding to a semiconductor device on an image of such a semiconductor wafer.
Dependencies are inferred from the claim text.