Substrate carrier and method for making a substrate carrier
AssigneeASML Netherlands B.V.
InventorsNoud Jan Gilissen, Joost Jeroen Ottens, Harmen Klaas Van Der Schoot, Petrus Matthijs Henricus Vosters
Life of this patent
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Abstract
A carrier for carrying a lithographic substrate or a lithographic patterning means. The carrier comprises a first member provided with an open hollow structure that is open to at least one side of the member. The carrier further comprises a second member connected to the first member, such that a closed hollow internal structure is formed between the carrier members.
Claims24
A carrier constructed to carry a lithographic substrate or a lithographic patterning device, said carrier comprising:
- a first member provided with an open hollow structure that is open to at least one side of said first member, said first member constructed to support a lithographic substrate or a lithographic patterning device;
- and
- a second member connected to said first member, such that a closed hollow internal structure is formed between said first and second members.
A lithographic apparatus comprising:
- a radiation system constructed to provide a beam of radiation;
- a support structure constructed to support a patterning device, said patterning device serving to impart a cross-section of said beam with a pattern to form a patterned beam;
- and
- a projection system that projects said patterned beam onto a target portion of a substrate, wherein said apparatus further includes a table constructed to hold said substrate or said patterning device, said table including a carrier constructed to carry a lithographic substrate or a lithographic patterning device, said carrier including
- a first member provided with an open hollow structure that is open to at least one side of said first member, said first member constructed to support a lithographic substrate or a lithographic patterning device;
- and
- a second member connected to said first member, such that a closed hollow internal structure is formed between said first and second members.
A method for making a carrier for carrying a lithographic substrate or a lithographic patterning device, the method comprising:
- providing at least two members, one of the at least two members being constructed to support a lithographic substrate or a lithographic patterning device;
- and
- connecting the at least two members to each other to form a carrier, where the at least two members are formed in such a way that the carrier comprises a substantially closed, hollow internal structure.
Dependencies are inferred from the claim text.