Circuit for detecting arcing in an etch tool during wafer processing
AssigneeNewport Fab, LLC
InventorsJohn Rha, Glenn W. Adams
Life of this patent
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Abstract
According to one exemplary embodiment, a circuit configured to interface with an etch tool comprises an ESC input for receiving a first signal from the etch tool, where the first signal indicates a magnitude of a chuck current passing through a chuck holding a wafer in the etch tool. The circuit further comprises a VRF input for receiving a second signal from the etch tool, which indicates a magnitude of a voltage difference between a plasma and the chuck in the etch tool. The circuit further comprises an arc detect output indicating whether an arc event has occurred. The circuit can be configured to prevent the arc detect output from indicating an occurrence of a chucking spike and a de-chucking spike in the etch tool.
Claims19
A circuit configured to interface with an etch tool, said circuit comprising:
- an ESC input for receiving a first signal from said etch tool, said first signal indicating a magnitude of a chuck current passing through a chuck holding a wafer in said etch tool;
- a VRF input for receiving a second signal from said etch tool, said second signal indicating a magnitude of a voltage difference between a plasma and said chuck in said etch tool;
- an arc detect output indicating whether an arc event has occurred wherein said arc detect output does not indicate an occurrence of a chucking spike and a de-chucking spike in said etch tool.
A circuit configured to interface with an etch tool, said circuit comprising:
- an ESC input for receiving a first signal from said etch tool, said first signal indicating a magnitude of a chuck current passing through a chuck holding a wafer in said etch tool;
- a VRF input for receiving a second signal from said etch tool, said second signal indicating a magnitude of a voltage difference between a plasma and said chuck in said etch tool;
- an arc detect output indicating whether an arc event has occurred;
- wherein said circuit is configured to prevent said arc detect output from indicating an occurrence of a chucking spike and a de-chucking spike in said etch tool.
Dependencies are inferred from the claim text.