Semiconductor device and method for evaluating characteristics of the same

A semiconductor device comprising:

• a semiconductor substrate;
• at least one actually used MIS transistor disposed in an active region within the semiconductor substrate;
• a plurality of MIS transistors used for evaluation which are disposed in active regions within the semiconductor substrate, include respective gate electrodes, respective source regions, and respective drain regions, and are used to typify characteristics of the actually used MIS transistor;
• a gate common conductive portion electrically connected to the respective gate electrodes of the MIS transistors used for evaluation;
• a source common conductive portion electrically connected to the respective source regions of the MIS transistors used for evaluation;
• and
• a drain common conductive portion electrically connected to the respective drain regions of the MIS transistors used for evaluation.