Radiation damage reduction
AssigneeKLA-Tencor Technologies Corporation
InventorSteven R. Lange
Life of this patent
Estimating the term…
Abstract
A method for limiting exposure of a substrate to potentially damaging radiation from a radiating apparatus. A database of information associated with the substrate is compiled, and the substrate is identified prior to processing the substrate on the radiating apparatus. The database of information associated with the substrate is accessed, including its past irradiation history of dosage and type of irradiation, based on the substrate identification, and the operation of the radiating apparatus is selectively modified based at least in part on the information associated with the substrate.
Claims20
A method for limiting exposure of a substrate to potentially damaging radiation from a radiating apparatus, the method comprising the steps of:
- compiling a database of information associated with the substrate, where the information is in regard to a susceptibility of the substrate to the potentially damaging radiation as determined from conditions of the substrate prior to processing on the radiating apparatus,
- identifying the substrate prior to processing the substrate on the radiating apparatus,
- accessing the database of information associated with the substrate, based on the substrate identification, and
- selectively modifying operation of the radiating apparatus in regard to the potentially damaging radiation delivered to the substrate based at least in part on the information associated with the substrate so as to not damage the substrate with the potentially damaging radiation.
A radiating apparatus for processing a substrate while limiting exposure of the substrate to potentially damaging radiation from the radiating apparatus, the radiating apparatus comprising:
- a first input adapted to receive a substrate identification prior to processing the substrate,
- a second input adapted to access a database of information associated with the substrate, based on the substrate identification, where the information is in regard to a susceptibility of the substrate to the potentially damaging radiation as determined from conditions of the substrate prior to processing on the radiating apparatus, and
- a processor adapted to selectively modify operation of the radiating apparatus based at least in part on the information associated with the substrate.
A software routine stored on a storage device that is readable by a computing device, the software routine adapted to control operation of the computing device, the software routine having modules for:
- receiving a substrate identification,
- accessing a database of information associated with the substrate, based on the substrate identification, where the information is determined from conditions of the substrate prior to processing with a radiating apparatus,
- receiving information associated with the radiating apparatus, and
- presenting information useffil to selectively modify operation of the radiating apparatus based at least in part on the information associated with the substrate, so as to limit potential damage to the substrate by the radiating apparatus.
Dependencies are inferred from the claim text.