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US 7,030,201 B2Granted
Bottom antireflective coatings
AssigneeAZ Electronic Materials USA Corp.
InventorsHuirong Yao, Shuji Ding-Lee, Hengpeng Wu, Zhong Xiang
Life of this patent
Estimating the term…
Abstract
The present invention relates to bottom antireflective coating compositions and polymers useful in making such compositions.
Claims22
A polymer comprising at least one repeating unit represented by formula (I)
- where R1, R2, and R3 are each independently selected from hydrogen or alkyl;
- R20, R22, R24, R26, R28, and R30 are independently selected from hydrogen, alkyl, aryl, aralkyl, or 5-, 6-, or 7-membered heterocyclic ring containing at least one heteroatom selected from nitrogen, oxygen or sulfur;
- R32, R34, and R36 are independently selected from hydrogen, alkyl, aryl, aralkyl, or 5-, 6-, or 7-membered heterocyclic ring containing at least one heteroatom selected from nitrogen, oxygen or sulfur;
- and Y is selected from linear or branched alkylene, monocyclic or polycyclic alkylene, arylene, aralkylene, polyoxyalkylene, linear or branched alkenylene, monocyclic or polycyclic alkenylene, aromatic or non-aromatic heterocyclic diradical and alicyclic diradical groups, the alkyl, aryl, aralkyl, heterocyclic ring, linear or branched alkylene, monocyclic or polycyclic alkylene, arylene, aralkylene, polyoxyalkylene, linear or branched alkenylene, monocyclic or polycyclic alkenylene, aromatic or non-aromatic heterocyclic diradical and alicyclic diradical being unsubstituted or substituted.
1 more element
A compound having the formula
- where R1, R2, and R3 are each independently selected from hydrogen or alkyl;
- R20, R22, R24, R26, R28, and R30 are independently selected from hydrogen, alkyl, aryl, aralkyl, or 5-, 6-, or 7-membered heterocyclic ring containing at least one heteroatom selected from nitrogen, oxygen or sulfur;
- R32, R34, and R36 are independently selected from hydrogen, alkyl, aryl, aralkyl, or 5-, 6-, or 7-membered heterocyclic ring containing at least one heteroatom selected from nitrogen, oxygen or sulfur;
- and Y is selected from linear or branched alkylene, monocyclic or polycyclic alkylene, arylene, aralkylene, polyoxyalkylene, linear or branched alkenylene, monocyclic or polycyclic alkenylene, aromatic or non-aromatic heterocyclic diradical and alicyclic diradical groups, the alkyl, aryl, aralkyl, heterocyclic ring, linear or branched alkylene, monocyclic or polycyclic alkylene, arylene, aralkylene, polyoxyalkylene, linear or branched alkenylene, monocyclic or polycyclic alkenylene, aromatic or non-aromatic heterocyclic diradical and alicyclic diradical being unsubstituted or substituted.
1 more element
An antireflective coating composition comprising:
- a) a polymer comprising at least one repeating unit represented by formula (I)
- where R1, R2, and R3 are each independently selected from hydrogen or alkyl;
- R20, R22, R24, R26, R28, and R30 are independently selected from hydrogen, alkyl, aryl, aralkyl, or 5-, 6-, or 7-membered heterocyclic ring containing at least one heteroatom selected from nitrogen, oxygen or sulfur;
- R32, R34, and R36 are independently selected from hydrogen, alkyl, aryl, aralkyl, or 5-, 6-, or 7-membered heterocyclic ring containing at least one heteroatom selected from nitrogen, oxygen or sulfur;
- and Y is selected from linear or branched alkylene, monocyclic or polycyclic alkylene, arylene, aralkylene, polyoxyalkylene, linear or branched alkenylene, monocyclic or polycyclic alkenylene, aromatic or non-aromatic heterocyclic diradical and alicyclic diradical groups, the alkyl, aryl, aralkyl, heterocyclic ring, linear or branched alkylene, monocyclic or polycyclic alkylene, arylene, aralkylene, polyoxyalkylene, linear or branched alkenylene, monocyclic or polycyclic alkenylene, aromatic or non-aromatic heterocyclic diradical and alicyclic diradical being unsubstituted or substituted;
- and
- b) at least one crosslinking agent.
4 more elements
Dependencies are inferred from the claim text.