Angular spin, rinse, and dry module and methods for making and implementing the same

A method for processing a substrate in a spin, rinse, and dry (SRD) module, the method comprising:

• providing the substrate to be processed;
• positioning the SRD module in a substrate receive position, the operation of positioning the SRD module including,
• opening a window disposed in a wall of the SRD module;
• and
• moving an engaging roller disposed within an enclosure of the SRD module from a first position to a second position, the moving being configured to provide a sufficient clearance for inserting the substrate into the SRD module at an insert position;
• orienting the substrate to be processed at the insert position that is defined at an angle;
• inserting the substrate into the SRD module at the angle;
• placing the SRD module in a process position;
• spinning the substrate at the angle;
• rinsing the substrate being spun at the angle;
• and
• drying the substrate being spun at the angle.