Stage device and angle detecting device
AssigneeEbara Corporation
InventorsHiroyuki Shinozaki, Hirosi Sobukawa, Shoji Yoshikawa
Life of this patent
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Abstract
The present disclosure provides a stage device applicable to a semiconductor manufacturing apparatus. A stage device 10 comprises a Y-axis stage 20 and an X-axis stage 40, the Y-axis stage 20 including a fixed component 21 and a movable component 26 movable along the Y-axis, the X-axis stage 40 including a fixed component 41 and a movable component 43 movable along the X-axis, wherein the fixed component 41 of the X-axis stage 40 is disposed on the movable component 26 of the Y-axis stage 20, the Y-axis is designed as a scanning axis, while the X-axis is designed as a stepping axis, and a non-contact sealing device is arranged between the fixed component 21 and the movable component 26 of the Y-axis stage 20.
Claims20
A stage device for a semiconductor manufacturing apparatus, comprising:
- a Y-axis stage including a fixed component and a movable component movably supported along the Y-axis by said fixed component;
- an X-axis stage including a fixed component and a movable component movably supported along the X-axis by said latter fixed component;
- said fixed component of said X-axis stage being disposed on said movable component of said Y-axis stage;
- said Y-axis being designed as a scanning axis, while said X-axis is designed as a stepping axis;
- and
- a non-contact sealing device being arranged between said fixed component and said movable component of said Y-axis stage, said non-contact sealing device being constituted by vacuuming a space between said fixed component and said movable component.
An angle detecting device for detecting a rotation angle of a rotating object, including:
- a target supported by a support means in a manner that said target has a degree of freedom of linear movement in a specific direction;
- a conversion means for converting a rotational displacement of said rotating object to a linear displacement of said target in a specified direction;
- and
- a detecting means for detecting the linear displacement of said target;
- wherein said conversion means includes a rod member extending radially from said rotating object and a member translating rotational movement of said rod member to said target.
Dependencies are inferred from the claim text.