Extraction method of defect density and size distributions
AssigneePDF Solutions, Inc.
InventorsChristopher Hess, David Stashower, Brian E. Stine, Larg H. Weiland, Richard Burch, Dennis J. Ciplickas
Life of this patent
Estimating the term…
Abstract
A characterization vehicle includes a substrate having at least one layer (300), and a plurality of pairs of nested serpentine lines on a single surface of a single layer of the substrate (301a . . . 301h, 302a . . . 302h), each pair of nested serpentine lines having a shared pad between them (312a . . . 312h).
Claims24
A characterization vehicle, comprising:
- a substrate having at least one layer;
- and
- a plurality of pairs of lines on a single surface of a single layer of the substrate, each pair of lines having a shared pad therebetween.
A method of designing a characterization vehicle, comprising the steps of:
- arranging a plurality of pairs of lines on a single surface of a single layer of a substrate;
- and
- locating a respective shared pad between the lines of each pair of lines.
A method of identifying defects, comprising the steps of:
- fabricating a characterization vehicle by forming a plurality of pairs of lines on a single surface of a single layer of a substrate, each pair of lines having a shared pad therebetween;
- and
- collecting defect data from the characterization vehicle.
A method of determining defect size distributions, comprising the steps of:
- (a) collecting defect size distributions from a characterization vehicle by forming a plurality of pairs of lines on a single surface of a single layer of a substrate, each pair of lines having a shared pad therebetween;
- and
- (b) determining which one of a pair of lines sharing a pad therebetween has a defect by identifying a sequence of the lines that are shorted together.
Dependencies are inferred from the claim text.