Imaging apparatus

An imaging apparatus comprising:

• a programmable patterning structure configured to pattern a beam of radiation, the programmable patterning structure including a plurality of separate patterning sub-elements, the sub-elements being configured to generate a patterned sub-beam;
• a combining structure configured to combine the plurality of patterned sub-beams into a single patterned image, the combining structure including at least one of a group consisting of a reflector and a beam splitter that receive the corresponding patterned sub-beam;
• and
• a projection system configured to project the patterned image onto a target portion of a substrate,
• wherein at least one of the patterned sub-beams is spatially modulated, and
• wherein at least one of the plurality of separate patterned sub-elements includes a plurality of separate arrays of radiation modulating devices.

A device manufacturing method, said method comprising:

• providing a beam of radiation;
• generating a plurality of patterned sub-beams based on the beam of radiation, at least one sub-beam being spatially modulated;
• combining the plurality of patterned sub-beams into a single patterned image;
• and
• projecting the patterned image onto a target portion of a layer of radiation-sensitive material that at least partially covers a surface of a substrate,
• wherein said generating the plurality of patterned sub-beams includes generating at least one of the plurality of patterned sub-beams from a plurality of separate arrays of radiation modulating devices, and
• wherein said combining includes directing the plurality of patterned sub-beams to corresponding ones of at least one of a group consisting of (1) a reflector that reflects at least one patterned sub-beams and (2) a beam splitter.