Arrangement of microstructures
AssigneeInfineon Technologies AG
InventorsZvonimir Gabric, Werner Pamler, Siegfried Schwarzl
Life of this patent
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Abstract
A method referred to as a “cellular damascene method” utilizes a multiplicity of regularly arranged closed cavities referred to as “cells”, which are produced in a patterning layer. The dimensions of the cavities are on the order of magnitude of the microstructures to be produced. Selected cavities are opened by providing a mask and partitions situated between adjacent opened cavities are removed to provide trenches and holes which are filled with the material of the microstructure to be fabricated. Protruding material is removed by means of a chemical-mechanical polishing step. The microstructures are, in particular, interconnects and contact holes of integrated circuit.
Claims8
An arrangement of microstructures having a patterned layer in which a multiplicity of closed cavities and a multiplicity of microstructures are arranged, the closed cavities being presented in a grid point of a predetermined raster and the microstructures running along the connecting lines that connect the grid points, the closed cavities having a given lateral extent in at least one direction and the lateral extent of the microstructure in this direction corresponds to at last twice the lateral extent of the cavities.
Dependencies are inferred from the claim text.