Method and device for manufacturing ceramics, semiconductor device and piezoelectric device
AssigneeSeiko Epson Corporation
InventorEiji Natori
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Abstract
A method for manufacturing ceramics includes a step of forming a ceramic film on a substrate by mixing a fine particle of a raw material species which becomes at least part of raw materials for ceramics with an active species, and feeding the mixed fine particle and active species to the substrate. A manufacture device includes a disposing section which also serves as a heating section for a substrate, a raw material species feeding section for feeding a fine particle of a raw material species, an active species feeding section for feeding an active species, and a mixing section for mixing the raw material species and the active species.
Claims16
A method for manufacturing ceramics on a substrate, comprising:
- mixing a fine particle of a raw material species which becomes at least part of raw materials for ceramics with an active species having high kinetic energy in a mixing chamber;
- after mixing the fine particle and active species in the mixing chamber, feeding the mixed fine particle and active species from the mixing chamber to the substrate so that the fine particles of the raw material species are deposited on the substrate while being provided with kinetic energy from the active species;
- and
- increasing the migration energy of atoms in the ceramic film for crystallization of the ceramic film by providing energy to the fine particles of the raw material species by the active species, wherein the ceramic film is formed by an LSMCD process or a misted CVD process.
Dependencies are inferred from the claim text.