Articulated carrying device
AssigneeTokyo Electron Limited
InventorKeisuke Kondoh
Life of this patent
Estimating the term…
Abstract
A carrying device carries a semiconductor wafer above a base disposed in a transfer chamber or the like. The carrying device comprises pick for holding the object, a main arm mechanism adapted to bend and stretch in a horizontal operating plane, and an auxiliary arm mechanism adapted to bend and stretch in a vertical operating plane. The main arm mechanism includes a proximal end supported by the base, and distal end connected to the pick, respectively. The auxiliary arm mechanism includes a main arm and an arm linkage. The main arm has a proximal end supported by the base, and distal end. The arm linkage has a proximal end connected to the distal end of the main arm and a distal end connected to the pick.
Claims9
A carrying device for carrying an object to be processed above a base, said carrying device comprising:
- (a) a pick for holding the object, the pick moving only in a first operating plane;
- (b) a main arm mechanism having a proximal end supported by the base and a distal end connected to the pick, the main mechanism comprising at least two arms pivotally connected to each other so as to bend and stretch only in the first operating plane;
- and
- (c) an auxiliary arm mechanism including:
- (c1) a base arm having a proximal end supported by the base, and a distal end, and
- (c2) an arm linkage having a proximal end connected to the distal end of the base arm and a distal end connected to the pick, the arm linkage comprising at least two arms pivotally connected to each other so as to bend and stretch only in a second operating plane intersecting the first operating plane.
A carrying device for carrying an object to be processed above a base, said carrying device comprising:
- (a) first and second picks each for holding the object;
- (b) a main arm mechanism adapted to bend and stretch in a first operating plane, and including:
- (b1) a main arm having a proximal end supported by the base and a distal end,
- (b2) a first arm having a proximal end connected to the distal end of the main arm and a distal end connected to the first pick, and
- (b3) a second arm having a proximal end connected to the distal end of the main arm and a distal end connected to the second pick;
- and
- (c) an auxiliary arm mechanism including:
- (c1) a base arm having a proximal part supported by the base, and having first and second distal ends,
- (c2) a first arm linkage having a proximal end connected to the first distal end of the base arm and a distal end connected to the first pick, the first arm linkage comprising at least two arms pivotally connected to each other so as to bend and stretch in a second operating plane intersecting the first operating plane, and
- (c3) a second arm linkage having a proximal end connected to the second distal end of the base arm and a distal end connected to the second pick, the second arm linkage comprising at least two arms pivotally connected to each other so as to bend and stretch in a third operating plane intersecting the first operating plane.
A carrying device for carrying an object to be processed above a base, said carrying device comprising:
- (a) first and second picks each for holding the object;
- (b) a main arm mechanism adapted to bend and stretch in a first operating plane, and including:
- (b1) a main arm having a proximal end supported by the base, and first and second distal ends spaced from each other,
- (b2) a first arm having a proximal end connected to the first distal end of the main arm and a distal end connected to the first pick, and
- (b3) a second arm having a proximal end connected to the second distal end of the main arm and a distal end connected to the second pick;
- and
- (c) an auxiliary arm mechanism including:
- (c1) a base arm having a proximal part supported by the base, and first and second distal ends,
- (c2) a first arm linkage having a proximal end connected to the first distal end of the base arm and a distal end connected to the first pick, the first arm linkage comprising at least two arms pivotally connected to each other so as to bend and stretch in a second operating plane intersecting the first operating plane, and
- (c3) a second arm linkage having a proximal end connected to the second distal end of the base arm and a distal end connected to the second pick, the second arm linkage
- comprising at least two arms pivotally connected to each other so as to bend and stretch in a third operating plane intersecting the first operating plane,
- wherein the base arm is configured to form an angle of less than 180° between a first extending direction from the proximal part toward the first distal end of the base arm, and a second extending direction from the proximal part toward the second distal end of the base arm, and
- the first and second picks are moved in parallel to the first and second extending directions, respectively.
Dependencies are inferred from the claim text.