Method and apparatus for separating sample
AssigneeCanon Kabushiki Kaisha
InventorsKazutaka Yanagita, Kiyofumi Sakaguchi
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Abstract
This invention is to improve the reproducibility and yield in separating a bonded substrate stack. A bonded substrate stack having a porous layer inside is held by substrate holding portions 105 and 106, and a fluid is injected from a nozzle to the porous layer of the bonded substrate stack, thereby separating the bonded substrate stack at the porous layer. The variation in pressure of the fluid is suppressed within a predetermined range by a servo-driven pump.
Claims24
A separating method of separating a sample by a fluid, wherein a sample having a fragile separation layer inside is separated at the separation layer while injecting a fluid whose variation in pressure is suppressed within a predetermined range to the separation layer of the sample.
A transfer method of transferring a transfer layer on a surface of a first member to a second member, comprising:
- the preparation step of preparing a composite member by bringing the first member having a separation layer inside and the transfer layer on the separation layer into tight contact with the second member;
- and
- the step of separating the composite member at the separation layer while injecting a fluid, maintained at substantially constant pressure by suppressing variation in the pressure within a predetermined range, to the separation layer of the composite member, thereby transferring the transfer layer of the first member to the second member.
A substrate manufacturing method comprising:
- the preparation step of preparing a bonded substrate stack by bonding a first substrate having a separation layer inside and a transfer layer on the separation layer to a second substrate;
- and
- the separation step of separating the bonded substrate stack at the separation layer while injecting a fluid, maintained at substantially constant pressure by suppressing variation in the pressure within a predetermined range, to the separation layer of the bonded substrate stack.
Dependencies are inferred from the claim text.