Ultrasonic bonding method and device

An ultrasonic bonding method for bonding a material to a bonding surface by the application of ultrasonic vibration, comprising the steps of:

• clamping two side faces of the material in the direction of ultrasonic vibration respectively with an application member that applies a predetermined ultrasonic vibration, and a clamping member that is synchronously vibrated in the same direction as that of the application member and at an amplitude substantially equal to that of the application member by the predetermined ultrasonic vibration transmitted from the application member through the material, and
• pressing the material against the bonding surface so as to bond the material to the bonding surface;
• and,
• wherein the material is bonded to the bonding surface while urging the clamping-member at a node of the clamping member, in such a direction that the clamping member presses the material against the application member.

An ultrasonic bonding device for bonding a material to a bonding surface by the application of ultrasonic vibration, the device comprising:

• a vibrator for producing ultrasonic vibration;
• an application member that supports one side face of the material in the direction of the ultrasonic vibration and that applies the ultrasonic vibration produced by the vibrator to the material;
• a clamping member that supports the other side face of the material and performs a clamping motion in the direction of the ultrasonic vibration and that is synchronously vibrated in the same direction as that of the application member and at an amplitude substantially equal to that of the application member by the ultrasonic vibration transmitted from the application member through the material;
• and
• an urging member which urges the clamping member in said direction so as to clamp the material in cooperation with the application member,
• wherein the application member, the clamping member, and the material vibrate together in the direction of the ultrasonic vibration.

An ultrasonic bonding device for bonding a material to a bonding surface by the application of ultrasonic vibration, the device comprising:

• a vibrator for producing ultrasonic vibration;
• an application member that supports one side face of the material in the direction of the ultrasonic vibration and that applies the ultrasonic vibration produced by the vibrator to the material;
• a clamping member that supports the other side face of the material in the direction of the ultrasonic vibration and that is synchronously vibrated in the same direction as that of the application member and at an amplitude substantially equal to that of the application member by the ultrasonic vibration transmitted from the application member through the material;
• and
• an urging member which urges the clamping member in a direction so as to clamp the material in cooperation with the application member,
• wherein the application member, the clamping member, and the material vibrate together in the direction of the ultrasonic vibration;
• and,
• wherein the urging member is connected to a node of the clamping member.

An ultrasonic bonding device for bonding a material to a bonding surface by the application of ultrasonic vibration, the device comprising:

• a vibrator for producing ultrasonic vibration;
• an application member that supports one side face of the material in the direction of the ultrasonic vibration and that applies the ultrasonic vibration produced by the vibrator to the material;
• a clamping member that supports the other side face of the material in the direction of the ultrasonic vibration and that is synchronously vibrated in the same direction as that of the application member and at an amplitude substantially equal to that of the application member by the ultrasonic vibration transmitted from the application member through the material;
• and
• an urging member which urges the clamping member in a direction so as to clamp the material in cooperation with the application member,
• wherein the application member, the clamping member, and the material vibrate together in the direction of the ultrasonic vibration;
• and, further comprising:
• a load control member which applies a controlled downward pressing load to the application member.

An ultrasonic bonding device for bonding a material to a bonding surface by the application of ultrasonic vibration, the device comprising:

• a vibrator for producing ultrasonic vibration;
• an application member that supports one side face of the material in the direction of the ultrasonic vibration and that applies the ultrasonic vibration produced by the vibrator to the material;
• a clamping member that supports the other side face of the material in the direction of the ultrasonic vibration and that is synchronously vibrated in the same direction as that of the application member and at an amplitude substantially equal to that of the application member by the ultrasonic vibration transmitted from the application member through the material;
• and
• an urging member which urges the clamping member in a direction so as to clamp the material in cooperation with the application member,
• wherein the application member, the clamping member, and the material vibrate together in the direction of the ultrasonic vibration;
• and, further comprising:
• a position control member which controls the amount of downward movement of the application member.

An ultrasonic bonding device for bonding a material to a bonding surface by the application of ultrasonic vibration, the device comprising:

• a vibrator for producing ultrasonic vibration;
• an application member that supports one side face of the material in the direction of the ultrasonic vibration and that applies the ultrasonic vibration produced by the vibrator to the material;
• a clamping member that supports the other side face of the material and performs a clamping motion in the direction of the ultrasonic vibration and that is synchronously vibrated in the same direction as that of the application member and at an amplitude substantially equal to that of the application member by the ultrasonic vibration transmitted from the application member through the material;
• and
• an urging member which urges the clamping member in said direction so as to clamp the material in cooperation with the application member,
• wherein the application member, the clamping member, and the material vibrate together in the direction of the ultrasonic vibration,
• wherein the application member is an ultrasonic horn shaped like a substantially symmetric inverted triangle, the vibrator is mounted at at least one of the right and left vertexes of the ultrasonic horn, and an output section is provided at a bottom vertex of the ultrasonic horn to apply ultrasonic vibration to the material, and
• wherein, when an ultrasonic vibration substantially parallel to an oblique side adjoining said at least one of the right and left vertexes of the ultrasonic horn is input from the vibrator, a horizontal ultrasonic vibration is output from the output section.