Wafer protective cassette
AssigneeChartered Semiconductor Manufacturing Ltd.
InventorsTong Wei Hua, Chia Bak Hong, Zhang Jian, Tan Liang Yong
Life of this patent
Estimating the term…
Abstract
A substrate cassette having a conventional form, an open container having an upper entrance and a narrow lower opening formed by two side panels and two end panels. A preferred embodiment includes a train of substrate alignment channels on the inner surfaces of the two side panels, each channel is U shaped and having planar surface with a left surface, a right surface, and a bottom surface. An arcuate curbing member disposed on a left surface in each of the substrate alignment channels. The arcuate curbing member includes a top end with a thinner sloped profile facing the upper open entrance of the cassette allowing a substrate to slide through and under a stepped lower end.
Claims16
A substrate carrier for securing a plurality of semiconductor substrates, comprising:
- a carrier having,
- axially opposed end partitions and laterally opposed arcuate side panels which are connected with said end partitions to form a four-sided box structure;
- spacing of said arcuate side panels by said end partitions to form a substrate entrance on top of said carrier, and a narrowed substrate support opening on the bottom side of said carrier;
- said arcuate side panels having an inner surface thereof, with an aligned train of substrate support channels for holding substrates in spaced parallel relation, said channels are formed having two side surfaces and a bottom surface, said substrate support channels having a curbing member formed on one side surface of each channel, said curbing member having a lead-in profile that is sloped and truncated enabling a circular substrate to slide into a substrate support channel past said curbing member there-in-after securing said substrate between the channel support surface and said curbing member.
A method for protecting a plurality of semiconductor substrates in a substrate carrier, comprising the steps of:
- providing a carrier having,
- axially opposed end partitions and laterally opposed arcuate shaped side panels which are connected to said end partitions to form a four-sided box structure;
- spacing of said arcuate shaped side panels by said end partitions to form a substrate entrance on top of said carrier, and a narrowed substrate support opening on the bottom side of said carrier;
- said side panels having an inner surface thereof, with a train of parallel substrate support channels for supporting substrates in spaced parallel relation, said channels are formed having two side surfaces and a bottom surface,
- said substrate support channels having a curbing member disposed on one side surface of each channel, said curbing member, having a sloped and truncated profile enabling a circular substrate to slide into a substrate support channel, past said curbing member, there-in-after securing said substrate between said substrate support surface and said curbing member.
Dependencies are inferred from the claim text.