Precision substrate storage container and retaining member therefor
AssigneeShin-Etsu Polymer Co., Ltd.
InventorsToshitsugu Yajima, Masato Hosoi, Hideo Kudo, Takashi Matsuo
Life of this patent
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AssigneeShin-Etsu Polymer Co., Ltd.
InventorsToshitsugu Yajima, Masato Hosoi, Hideo Kudo, Takashi Matsuo
Estimating the term…
A presser member (1) of the present invention is formed of different materials for the contacting part (5) to press-hold the precision substrates (15) and for the parts other than the contacting part (5). The presser member (1) is shaped from a thermoplastic elastomer for a rectangular frame part, and the contacting part (5) has a pair of structuring parts (4) provided in such a fashion as to inwardly extend from each of a pair of oppositely facing sides. A second contacting part (11) is formed in the extension peripheral part extending via a supporting part (10). The other parts are shaped from a thermoplastic resin. The aforementioned contacting part (5) is provided with grooves of a V-shaped cross section with inclinations changed in the middle for receiving the peripheries of precision substrates (15), and V-grooves for press-holding the peripheries of precision substrates are provided in resilient pieces (12) separated and protruding in a comb teeth-like fashion to form the second contacting part (11).
A presser member to be mounted in a container vessel for storing and transporting precision substrates, said presser member comprising:
A container vessel for storing and transporting precision substrates, said container vessel comprising:
Dependencies are inferred from the claim text.