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US 7,017,411 B2Granted
Apparatus with selected fill gas
AssigneeAnalog Devices, Inc.
InventorsJohn A. Geen, John Martin
Life of this patent
Estimating the term…
Abstract
An inertial sensor has an interior filled with a relatively low viscosity fill gas. To that end, the inertial sensor has a housing forming the noted interior, and a movable component within the interior. The inertial sensor also has the noted fill gas within the interior. The fill gas has a viscosity that is less than the viscosity of nitrogen under like conditions. For example, when subjected to the same temperatures and pressures, the fill gas has a viscosity that is less than the viscosity of nitrogen.
Claims17
An inertial sensor comprising:
- a housing forming an interior;
- a movable component within the interior, the movable component being a part of a MEMS device;
- and
- a fill gas within the interior,
- the fill gas having a viscosity that is less than the viscosity of nitrogen under like conditions.
2 more elements
An inertial sensor comprising:
- means for detecting movement;
- means for containing the detecting means, the detecting means including a MEMS device;
- and
- means for damping the detecting means, the damping means being within the containing means,
- the damping means having a viscosity that is less than the viscosity of nitrogen under like conditions.
2 more elements
An apparatus comprising:
- a package forming an interior with a substantially non-zero pressure;
- a device within the interior, the device including a MEMS device;
- and
- a fill gas within the interior,
- the fill gas having a viscosity that is less than 17.6 micropascal-seconds at about 20 degrees C.
2 more elements
Dependencies are inferred from the claim text.