Loading patent…
AssigneeLam Research Corporation
InventorsYehiel Gotkis, Vladimir Katz, David Hemker, Rodney Kistler, Nicolas J. Bright
Estimating the term…
A method for converting a slope based detection task to a threshold based detection task is provided. The method initiates with defining an approximation equation for a set of points corresponding to values of a process being monitored. Then, an expected value at a current point of the process being monitored is predicted. Next, a difference between a measured value at the current point of the process being monitored and the corresponding expected value is calculated. Then, the difference is monitored for successive points to detect a deviation value between the measured value and the expected value. Next, a transition point for the process being monitored is identified based on the detection of the deviation value. A processing system configured to provide real time data for a slope based transition and a computer readable media are also provided.
A method for converting a slope based detection task to a threshold based detection task, comprising:
A semiconductor processing system capable of detecting a transition point for slope change transitions through a threshold determination in real time, comprising:
A method for detecting a transition point of a slope based change through a threshold detection, comprising
A computer readable media having program instructions for converting a slope based detection task to a threshold based detection task, comprising:
Dependencies are inferred from the claim text.