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US 7,009,688 B2Granted
Printing by active tiling
AssigneeQinetiq Limited
InventorsRichard Jonathan Miller, Mark Anthony Gleeson Smith
Life of this patent
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AssigneeQinetiq Limited
InventorsRichard Jonathan Miller, Mark Anthony Gleeson Smith
Estimating the term…
A photosensitive area 11, such as a photolithographic sheet, in an images plane is notionally subdivided in both dimensions to form contiguous (tiled) sub-areas. Variable illumination means 1,4 provides a selected pixellated light pattern, which is directed 8, 9, 10 to fill a selected one of the sub-areas so that pixels of said pattern are, at least 15 microns across at the sub-area, and control means are responsive to an input signal representative of an image conjointly to control the production and direction of the pixellated patterns so that an entire image is produced over all of the said sub-areas. As shown, the variable illumination means comprises a light source 2 with digital micro-mirror array deflector device 4, and the sub-area is selected by lens array 8 with a shutter 10 and polariser array 11. The latter may be replaced by a two-axis steering mirror and lens array. An analogue micro-mirror array, optionally with, a kaleidoscope, may be used in the illumination means, with (a) collimating optics and lens array; or (b) a focussing macro-lens, for sub-area selection.
Apparatus for exposing a photosensitive area in an image plane which area is notionally subdivided in both dimensions to form contiguous sub-areas, the apparatus comprising variable illumination means for producing a selected pixellated light pattern, directing means for directing said pattern to fill a selected one of said sub-areas, and control means responsive to an input signal representative of an image conjointly to control said illumination means and said directing means such that the entire image is produced over all of the said sub-areas, wherein said directing means comprises means for replicating said light pattern to form an array of like patterns, and selecting means for selecting one of said patterns for transmission to a corresponding sub-area of said area.
Apparatus for exposing a photosensitive area in an image plane which area is notionally subdivided in first and second dimensions to form contiguous sub-areas, the apparatus comprising variable illumination means both for producing a selected pixellated light pattern and for directing said pattern in a direction corresponding to a selected one of said sub-areas in said image plane, the variable illumination means comprising in part a micro-electrochemical device in the form of a two dimensional array to tiltable mirrors, and control means responsive to an input signal representative of an image to control said illumination means such that respective said pixellated light patterns are provided in each of the sub-areas in a sequence to synthesise the entire image, wherein the illumination means comprises an array of selectively operable elements, each element being individually capable of directing incident light towards the image plane at any selected one of a plurality of angles in at least the first said dimension so to form a said pixellated light pattern, said selected angle determining at least in part the selected sub-area.
A method of exposing a photosensitive area, in response to an input signal representative of an image, said area being notionally subdivided in both dimensions to form contiguous sub-regions, comprising the steps of providing a pixellated light pattern corresponding to a selected part of said image and directing said pattern to fill a corresponding selected one of said sub-regions and repeating the process for other sub-regions until the entire image is produced over all of the sub-regions of said area, said method including the steps of replicating said light pattern to form an array of like patterns, and selecting one of said patterns for transmission to a corresponding sub-area of said area.
A method of exposing a photosensitive area, in response to an input signal representative of an image, said area being notionally subdivided in both dimensions to form contiguous sub-regions, comprising the steps of providing a pixellated light pattern corresponding to a selected part of said image and directing said pattern to fill a corresponding selected one of said sub-regions and repeating the process for other sub-regions until the entire image is produced over all of the sub-regions of said area, said method including the steps of controlling individual elements of a light modulator array both to produce said pixellated pattern with light and to direct light towards the image plane at any selected one of a plurality of angles thereby to determine at least in part the selected sub-area, the light modulator comprising in part a micro-electromechanical device in the form of a two dimensional array to tiltable mirors.
Dependencies are inferred from the claim text.