Foam core chuck for the scanning stage of a lithography system
AssigneeASML Holding N.V.
InventorSantiago E. del Puerto
Life of this patent
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Abstract
A foam core chuck for use in a scanning stage of a lithography system is disclosed. In accordance with an embodiment of the present invention, the lithography stage includes a frame and a chuck supported by the frame. The chuck has a foam core structure that is covered by a shell layer. An electromagnetic device for supporting and positioning the chuck is coupled to the stage. The electromagnetic device, for example an electromagnetic motor, is coupled to the stage such that at least one coil is coupled to the frame and at least one magnet is coupled to the foam core structure of the chuck. The foam core structure acts as a distributed flexure for the magnet.
Claims24
A lithography stage, comprising:
- a frame;
- a chuck supported by said frame, said chuck having a foam core structure covered by a shell layer;
- and
- an electromagnetic device for supporting and positioning said chuck, said electromagnetic device having at least one coil coupled to said frame and at least one magnet coupled to said foam core structure of said chuck;
- wherein said foam core structure acts as a distributed flexure for said magnet.
A method for making a chuck that supports a workpiece in a lithographic stage having a positioning apparatus, comprising:
- (a) forming a foam core structure;
- (b) forming a shell layer on said foam core structure;
- (c) exposing a portion of said foam core structure;
- and
- (d) coupling said exposed region of said foam core structure to the positioning apparatus, wherein said exposed region of said foam core structure acts as a distributed flexure for the positioning apparatus.
A lithography stage, comprising:
- a frame;
- a chuck supported by said frame;
- and
- an electromagnetic device for supporting and positioning said chuck, said electromagnetic device having at least one coil coupled to said frame and at least one magnet coupled to said chuck, wherein said magnet is coupled to said chuck using a silicon carbide foam structure as a distributed flexure.
Dependencies are inferred from the claim text.