Back to results
US 7,009,276 B2Granted
Thin film capacitor, thin film capacitor array and electronic component
AssigneeKYOCERA Corporation
InventorKazuhiro Kusabe
Life of this patent
Estimating the term…
Loading patent…
Loading patent…
AssigneeKYOCERA Corporation
InventorKazuhiro Kusabe
Estimating the term…
A thin film capacitor with small electrode resistance and great Q-value which comprises a small number of thin films that are deposited successively is disclosed. It is effective for miniaturization and high density packaging of a device and for preventing poor characteristics and degradation of reliability. A plurality of lower electrodes 2 are provided on a supporting substrate 1, which are spaced apart from each other in a high frequency signal propagation direction P. Two upper electrodes 5 spaced apart from each other in the high frequency signal propagation direction P are provided on one of the plurality of the lower electrodes 2 through a thin film dielectric layer 4, by which two capacitance elements are formed. The upper electrodes 5 are connected together by an extraction electrode 8 so that the two capacitance elements are connected in series. A maximum distance L1 between the two upper electrodes 5 in the high frequency signal propagation direction P is smaller than a minimum length W1 of the upper electrodes 5 in the direction perpendicular to the high frequency signal propagation direction P in plan view.
A thin film capacitor having capacitance elements connected between an input terminal and output terminal comprising:
A thin film capacitor having capacitance elements connected between an input terminal and an output terminal, comprising:
A thin film capacitor having capacitance elements connected between an input terminal and an output terminal, comprising:
Dependencies are inferred from the claim text.