Apparatus for measuring gap between mask and substrate using laser displacement sensor, and method thereof
AssigneeElectronics and Telecommunications Research Institute
InventorsChangsoo Kwak, Eul Gyoon Lim, Dae Yong Kim
Life of this patent
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Abstract
An apparatus for measuring a gap between a mask and a substrate and a method thereof are provided. The apparatus includes a laser displacement sensor, which is placed on a mask and a substrate spaced apart from each other by a predetermined gap, emits laser beams while moving onto the mask and the substrate in a horizontal direction and measures a gap between the mask and the substrate using a variation in distance values measured based on light-receiving positions of the laser beams that are reflected from the mask and the substrate and return to their original positions, respectively.
Claims6
An apparatus for measuring a gap between a mask and a substrate, the apparatus comprising:
- a laser displacement sensor, which is placed on a mask and a substrate spaced apart from each other by a predetermined gap, emits laser beams while moving over the mask and the substrate in a horizontal direction and measures a gap between the mask and the substrate using a variation in distance values measured successively based on light-receiving positions of the laser beams that are reflected from the mask and the substrate, respectively;
- a Z-direction transferring unit, which adjusts a vertical distance (Z-direction distance) between the laser displacement, the mask, and the substrate;
- an X-direction transferring unit, which enables the laser displacement sensor to move in a widthwise direction (X direction) in the plane parallel to the mask or the substrate;
- and
- a Y-direction transferring unit, which enables the laser displacement sensor to move in a lengthwise direction (Y direction) in the plane parallel to the mask or the substrate.
A method of measuring a gap between a mask and a substrate, the method comprising:
- moving a laser displacement sensor to a predetermined position on a mask and a substrate spaced apart from each other by a predetermined gap;
- adjusting a vertical distance between the mask or the substrate and the laser displacement sensor so as to match an operating distance of the laser displacement sensor;
- emitting laser beams on an upper surface of the substrate by passing the mask, and measuring a first distance value based on light-receiving positions of the laser beams that are reflected from the upper surface of the substrate, using the laser displacement sensor;
- emitting laser beams on a mask pattern placed on a lower surface of the mask and measuring a second distance value based on light-receiving positions of the laser beams that are reflected from the mask pattern, using the laser displacement sensor;
- and
- determining the gap between the mask and the substrate using a difference between the first distance value and the second distance value.
Dependencies are inferred from the claim text.