Modified alginic acid of alginic acid derivatives and thermosetting anti-reflective compositions thereof
AssigneeAZ Electronic Materials USA Corp.
InventorsHengpeng Wu, Zhong Xhiang, Shuji Ding-Lee, Jianhui Shan, Eleazar B. Gonzalez
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Abstract
Modified alginic acid or alginic acid derivatives and anti-reflective coatings based on thereon are described.
Claims12
Solvent soluble acetyl alginate modified with a light-absorbing compound so as to leave sufficient hydroxyl and/or carboxyl groups on the acetyl alginate for crosslinking with a crosslinking compound wherein the light absorbing compound is an aromatic oxide selected from styrene oxide, 1,2-epoxy-phenoxypropane, glycidyl-2-methylphenyl ether, (2,3-epoxypropyl)benzene, 1-phenylpropylene oxide, stilbene oxide, 2-(or 3- or 4-)halo stilbene oxide, benzyl glycidyl ether, C1-10 straight or branched chain alkylphenyl glycidyl ether, 4-halophenyl glycidyl ether, glycidyl 4-C1-10 straight or branched chain alkoxyphenyl ether, 2,6-dihalobenzylmethyl ether, 3,4-dibenzyloxybenzyl halide, 2-(or 4-)methoxybiphenyl, 3,3′-(or 4,4′-)diC1-10 straight or branched chain alkoxybiphenyl, 4,4′-dimethoxyoctafluorobiphenyl, 1-(or 2-)C1-10 straight or branched chain alkoxynaphthalene, 2-halo-6-methoxynaphthalene, 2,6-diC1-10 straight or branched chain alkoxynaphthalene, 2,7-diC1-10 straight or branched chain alkoxynaphthalene, 1,2,3,4,5,6-hexahalo-7-C1-10 straight or branched chain alkoxynaphthalene, 9,10 -bis(4-C1-10 straight or branched chain alkoxyphenyl )-anthracene, 2-C1-10 straight or branched chain alkyl-9,10-diC1-10 straight or branched chain alkoxyanthracene, 9,10-bis(4-C1-10 straight or branched chain alkoxyphenyl)-2-halo-anthracene, 2,3,6,7,10,11-hexamethoxytriphenylene, glyciclyl-3-(pentadecadienyl)phenyl ether, 4-t-butylphenylglycidyl ether, triphenylolmethane triglycidyl ether, [(4-(1-heptyl-8-[3-(oxiranylmethoxy)phenyl]octyl)phenoxy)methyl]oxirane, tetraphenylolethane tetraglycidyl ether, and hydroxyphenol diglycidyl ether.
Dependencies are inferred from the claim text.