Area efficient asymmetric cellular CMOS array

#The present invention is related generally to a cellular transistor array, and more particularly, to an asymmetric cellular MOS array.

#Ever since the presence of integrated circuit (IC), the minimum channel width of the transistor in a chip has decreased with the improvement of the semiconductor process, the number of the transistors integrated in a chip has increased with stronger function and wider applications. As shown in FIG. 1, a conventional lateral cellular CMOS array 100 has a configuration of symmetric structure, in which polygon regions 102 and 108 are sources, polygon regions 104 and 106 are drains, each of them includes four contacts 112, and the sources 102 and 108 further include pick up contact 114 of the substrate. In this exemplary layout, the regions 102, 104, 106 and 108 are N+ type, poly silicon mesh 110 is used for the gates between the sources and the drains, the length and the width of the gate 110 between adjacent source/drain are L and W, respectively, and the drains 104 and 106 are lightly doped to form N type double drain (NDD) for this cellular CMOS array 100 available to be used as a high-voltage device.

#Due to the rapid development of the semiconductor industry, high density and low cost are the goals each semiconductor fab chases, and it is therefore desired a denser cellular CMOS array for a wafer of the same size to be diced into more chips to lower the cost.

#These and other objects, features and advantages of the present invention will become apparent to those skilled in the art upon consideration of the following description of the preferred embodiments of the present invention taken in conjunction with the accompanying drawings, in which:

#FIG. 1 shows a conventional cellular CMOS array;

#FIG. 2 shows a cellular CMOS array according to the present invention;

#For a MOS to operate normally under high voltage, its drain is typically lightly doped to be an NDD to enhance the voltage endurance of the drain. Therefore, from the point of view on electric theory, the reduction of the area of the drain will result in higher electric field thereof and induces breakdown under the operation with high voltage. However, the reduction of the area of the source has no effect in this aspect, and thus, the reduction of the area of the total CMOS array can be achieved by decreasing the area of the source.

#FIG. 2 shows a layout of an asymmetric cellular CMOS array 200 according to the present invention, in which the rectangular regions 202 and 208 are sources, the polygon regions 204 and 206 are drains, each of the drains 204 and 206 has an area larger than those of the sources 202 and 208, gate 210 in a mesh shape is between the regions 202–208, and under the gate 210 the length and the width of the channel between the adjacent source/drain are L and W, respectively. Each of the source regions 202 and 208 includes contact 212 and pick up contact 214, each of the drain regions 204 and 206 includes four contacts 216, and the drain regions 204 and 206 are lightly doped to become NDDs for serving as a high voltage device. FIG. 3 shows a cross-sectional view of the cellular CMOS array 200 along the AA′ direction designated in FIG. 2, in which numeral 220 designates the substrate and numeral 222 designates the channel.

#To compare the asymmetric cellular CMOS array 200 of the present invention and the conventional symmetric cellular CMOS array 100, these two layouts are overlapped by overlapping the drain 104 of the array 100 and the drain 204 of the array 200 as shown in FIG. 4, in which the solid line indicates the array 200 and it has the area designated by region 218, and the dashed line indicates the array 100 and its area is designated by region 116. In this array 200, under the conditions that the sources area is decreased, but the lengths L and the widths W of the channels do not change, the drain 206 is moved to the upper right direction to align to the sources 202 and 208, and as a result, the total area 218 of the CMOS array 200 is smaller than that of the conventional CMOS array 100.