Method and apparatus for manufacturing a device having a moveable structure
AssigneeInfineon Technologies AG
InventorsStefan Barzen, Alfons Dehe
Life of this patent
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Abstract
In a method for manufacturing a device having a moveable structure a substrate is processed in order to obtain intermediate devices on the substrate, wherein an intermediate device comprises the moveable structure and a protective structure protecting the moveable structure. The substrate is diced in order to obtain a diced intermediate device comprising the protective structure. Subsequently, the protective structure is removed from the diced intermediate device in order to obtain the device. An apparatus for manufacturing a device includes means for performing the method steps.
Claims11
A method for manufacturing a device having a moveable structure, comprising:
- processing a substrate to obtain intermediate devices on the substrate, wherein an intermediate device comprises the moveable structure and a protective structure protecting the moveable structure;
- dicing the substrate in order to obtain a diced intermediate device comprising the protective structure;
- introducing the diced intermediate device into a compartment of a plurality compartments of a device holder, wherein each compartment of the plurality of compartments includes a recess in the device holder and is implemented so that it enables a fluid communication between the recess and an environment of the device holder;
- and
- removing the protective structure from the diced intermediate device while the diced intermediate device is held in the device holder, by feeding a fluid from the environment of the device holder to the diced intermediate device in the device holder in order to obtain the device;
- and
- testing the device comprising the moveable structure, while the device is held within the device holder.
An apparatus for manufacturing a device having a moveable structure, comprising:
- a processor for processing a substrate which is implemented in order to generate an intermediate device comprising the moveable structure and a protective structure protecting the moveable structure on the substrate;
- a dicer for dicing the substrate which is implemented in order to obtain a diced intermediate device comprising the protective structure;
- a remover for removing the protective structure from the diced intermediate device which is implemented in order to obtain the device;
- and
- a device holder for holding the diced intermediate device within the remover for removing, wherein the device holder comprises a plurality of compartments for accepting intermediate devices and wherein each compartment of the plurality of compartments includes a recess and is implemented so that it enables a fluid communication between the recess and an environment of the device holder,
- wherein the remover for removing is implemented in order to remove the protective structure by supplying a fluid from the environment of the device holder to the diced intermediate device within the device holder;
- and
- a tester for testing the device which is implemented in order to test the device held within the device holder.
Dependencies are inferred from the claim text.