Pressure energized pressure vessel opening and closing device and method of providing therefor
AssigneeTokyo Electron Limited
InventorAlexei Sheydayi
Life of this patent
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AssigneeTokyo Electron Limited
InventorAlexei Sheydayi
Estimating the term…
A closure assembly coupled to a vessel including a chamber and an access port in communication with the chamber, the closure assembly comprising: a door assembly coupled to the vessel and configured to move between an open position and a closed position, the door assembly in contact with the access port at a first location thereby sealing the chamber in the closed position, wherein pressure within the chamber applies a force to the door assembly at the first location. An actuator in moveable contact with the door assembly at a second location, the actuator configured to apply a counteracting force to the door assembly at the second location in response to pressure within the chamber to maintain the door assembly in the closed position. The actuator moves between a non-actuated and actuated position within an actuator bore, the actuator in the actuated position when a desired amount of pressure is applied to the actuator bore.
A closure assembly coupled to a vessel including a chamber and an access port for receiving a wafer, the access port in communication with the chamber, the closure assembly comprising:
A pressure energized closure device coupled to a vessel having a chamber configured to be pressurized within, the vessel having an access port to receive a wafer, the access port configured on an outer surface of the vessel and in communication with the chamber, the closure device comprising:
A closure assembly coupled to a vessel including a chamber and an access port for receiving a wafer, the access port in communication with the chamber, the closure assembly comprising:
Dependencies are inferred from the claim text.