US 6,976,822 B2 · End-effectors and transfer devices for handling microelectronic workpieces

Abstract

Passive end-effectors for handling microelectronic workpieces having a perimeter edge circumscribing a first diameter. In one embodiment, a passive end-effector in accordance with the invention includes a body having a plurality of contact sites located along a circle corresponding to the first diameter of the workpiece. The body, for example, can be a paddle or a fork. The passive end-effector can also include a plurality of passive abutments that are carried by the body. The abutments are located along the circle, and the abutments are configured to support the workpiece in a plane spaced apart from the body. The abutments, for example, can each include an inclined surface that slopes downwardly toward a central region of the circle to support only the edge of the workpiece in a manner that suspends or otherwise spaces the workpiece in a plane that is spaced apart from the body. The passive end-effector can further include a sensor assembly that is carried by the body. The sensor includes an engagement member positioned at least partially within the circle, and the engagement member is configured to move generally transverse to the plane as the workpiece is loaded on and unloaded from the end-effector. The passive end-effector does not include an active member that exerts a force against the edge of the workpiece parallel to the plane of the workpiece.

Claims44

Dependent claims

A passive end-effector for handling a microelectronic workpiece having a perimeter edge circumscribing a first diameter, comprising:

a body having a plurality of contact sites located along a circle corresponding to the first diameter of the workpiece, the contact sites including at least a first contact site, a second contact site and a third contact site, wherein the first and second contact sites are on a semicircle of the circle and the third contact site is on an opposing semicircle of the circle;
a plurality of passive retainers carried by the body including at least a first retainer at the first contact site, a second retainer at the second contact site and a third retainer at the third contact site, each retainer including an inclined surface that slopes downwardly toward a central region of the circle to support an edge of the workpiece, wherein the inclined surfaces are arranged to hold the workpiece in a plane spaced apart from the body;
and
a sensor carried by the body, the sensor having a moveable pin with a contact region at least partially within the circle, wherein the pin moves generally transverse to the plane as the workpiece is loaded on and unloaded from the end-effector.

1 more element

A passive end-effector for handling a microelectronic workpiece having a perimeter edge circumscribing a first diameter, comprising:

a body having a plurality of contact sites located along a circle corresponding to the first diameter of the workpiece;
a plurality of passive retainers carried by the body, each retainer including an inclined surface that slopes downwardly toward a central region of the circle to support the workpiece in a plane spaced apart from the body;
a sensor carried by the body, the sensor having a moveable pin with a contact region at least partially within the circle, wherein the pin moves generally transverse to the plane;
and
wherein the passive end-effector does not include an active member that moves between a release position in which it is engaged with the workpiece and a processing position in which it presses the workpiece against the retainers.

2 more elements

A passive end-effector for handling a microelectronic workpiece having a perimeter edge circumscribing a first diameter, comprising:

a body having a plurality of contact sites located along a circle corresponding to the first diameter of the workpiece;
a plurality of passive retainers carried by the body, the retainers being located along the circle, and the retainers being configured to support the workpiece in a plane spaced apart from the body;
a sensor carried by the body, the sensor having an engagement member positioned at least partially within the circle, wherein the engagement moves generally transverse to the plane;
and
wherein the passive end-effector does not include an active member that exerts a force against the edge of the workpiece parallel to the plane to press the workpiece against the retainers.

2 more elements

A transfer device for handling a microelectronic workpiece having a perimeter edge circumscribing a first diameter, comprising:

a transport unit configured to move along a transport path;
an arm carried by the transport unit;
and
an end-effector carried by the arm, the end-effector comprising
a body having a plurality of contact sites located along a circle corresponding to the first diameter of the workpiece, the contact sites including at least a first contact site, a second contact site and a third contact site, wherein the first and second contact sites are on a semicircle of the circle and the third contact site is on an opposing semicircle of the circle;
a plurality of passive retainers carried by the body including at least a first retainer at the first contact site, a second retainer at the second contact site and a third retainer at the third contact site, each retainer including an inclined surface that slopes downwardly toward a central region of the circle to support an edge of the workpiece, wherein the inclined surfaces are arranged to hold the workpiece in a plane spaced apart from the body;
and
a sensor carried by the body, the sensor having a moveable pin with a contact region at least partially within the circle, wherein the pin moves generally transverse to the plane as the workpiece is loaded on or unloaded from the end-effector.

5 more elements

A transfer device for handling a microelectronic workpiece having a perimeter edge circumscribing a first diameter, comprising:

a transport unit configured to move along a transport path;
an arm carried by the transport unit;
and
an end-effector carried by the arm, the end-effector comprising
a body having a plurality of contact sites located along a circle corresponding to the first diameter of the workpiece;
a plurality of passive retainers carried by the body, each retainer including an inclined surface that slopes downwardly toward a central region of the circle to support the workpiece in a plane spaced apart from the body;
a sensor carried by the body, the sensor having a moveable pin with a contact region at least partially within the circle, wherein the pin moves generally transverse to the plane;
and
wherein the end-effector does not include an active member that exerts a force against the edge of the workpiece parallel to the plane to press the workpiece against the retainers.

6 more elements

A transfer device for handling a microelectronic workpiece having a perimeter edge circumscribing a first diameter, comprising:

a transport unit configured to move along a transport path;
an arm carried by the transport unit;
and
an end-effector carried by the arm, the end-effector comprising
a body having a plurality of contact sites located along a circle corresponding to the first diameter of the workpiece;
a plurality of passive retainers carried by the body, the retainers being located along the circle, and the retainers being configured to support the workpiece in a plane spaced apart from the body;
a sensor carried by the body, the sensor having an engagement member positioned at least partially within the circle, wherein the engagement moves generally transverse to the plane;
and
wherein the end-effector does not include an active member that exerts a force against the edge of the workpiece parallel to the plane to press the workpiece against the retainers.

6 more elements

A method of handling a microelectronic workpiece having a perimeter edge circumscribing a first diameter, comprising:

supporting a perimeter edge of the workpiece to hold the workpiece in a plane without exerting a force against the workpiece in a direction parallel to the plane;
and
detecting whether a moveable pin located at least partially within the first diameter of the workpiece is displaced by the workpiece in a direction transverse to the plane.

A method of handling a microelectronic workpiece having a perimeter edge circumscribing a first diameter, comprising:

contacting a perimeter edge of the workpiece with a plurality of passive retainers to hold the workpiece in a plane without exerting a force against the workpiece in a direction parallel to the plane;
engaging a pin of a sensor with the workpiece, the pin being moveable transversely relative to the plane under the influence of the weight of the workpiece;
and
detecting whether the pin was displaced by the workpiece in a direction transverse to the plane.

1 more element

Dependencies are inferred from the claim text.

End-effectors and transfer devices for handling microelectronic workpieces

Life of this patent

End-effectors and transfer devices for handling microelectronic workpieces

Life of this patent

Abstract

Claims44