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US 6,958,523 B2Granted
On chip heating for electrical trimming of polysilicon and polysilicon-silicon-germanium resistors and electrically programmable fuses for integrated circuits
AssigneeTexas Instruments Incorporated
InventorsJeffrey A. Babcock, Angelo Pinto, Gregory E. Howard, Philipp Steinmann, Scott Balster
Life of this patent
Estimating the term…
Abstract
An integrated circuit programmable structure (60) is formed for use a trim resistor and/or a programmable fuse. The programmable structure comprises placing heating elements (70) in close proximity to the programmable structure (60) to heat the programmable structure (60) during programming.
Claims6
An integrated circuit trim resistor structure with on-chip heaters, comprising:
- providing a substrate with at least one isolation structure;
- a doped polysilicon trim resistor structure on said isolation structure;
- and
- at least one heating structure on said isolation structure adjacent to said trim resistor structure and separated from said trim resistor structure by a heat conducting electrical insulator.
1 more element
An integrated circuit trim resistor structure with on-chip heaters, comprising:
- providing a substrate with at least one isolation structure;
- a heating structure on said isolation structure;
- a heat conducting electrical insulator on said heating structure;
- and
- a doped polysilicon trim resistor structure on said heat conducting electrical insulator.
2 more elements
Dependencies are inferred from the claim text.