Cylindrical magnetron target and spindle apparatus
AssigneeSputtering Components, Inc.
InventorDaniel T. Crowley
Life of this patent
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Abstract
A cylindrical magnetron target and spindle attachment apparatus for affixing a cylindrical magnetron target to a rotatable support spindle. The attachment apparatus includes a target and a spindle. The target defines a receiving portion. The spindle has a spindle plug. The spindle plug is disposed within the receiving portion of the target. The attachment apparatus increases the speed and ease of removing and installing cylindrical rotating targets onto a support spindle.
Claims16
An apparatus for affixing a cylindrical magnetron target to a rotatable support spindle, comprising:
- a cylindrical target structure having a receiver in a hollow portion of a target structure interior;
- and
- a support spindle structure having a spindle plug at one end thereof, the spindle plug being operatively configured to be entirely disposed within the receiver.
A sputtering magnetron attachment apparatus comprising:
- a cylindrical target structure having a receiver in a hollow portion of a target structure interior, the receiver comprising a head aperture for receiving a head of a fastener;
- and
- a support spindle structure having a spindle plug at one end thereof disposed within the receiver, the spindle plug comprising a thread aperture for receiving a thread of a fastener;
- and
- a fastener disposed within the head aperture and the thread aperture such that the support spindle structure is operatively coupled to the cylindrical target structure.
A method for affixing a cylindrical magnetron target to a rotatable support spindle, the method comprising:
- providing a cylindrical target structure having a receiver in a hollow portion of a target structure interior;
- and
- providing a support spindle structure having a spindle plug at one end thereof;
- and
- inserting the spindle plug entirely within the receiver such that the support spindle structure can be connected to the cylindulcal target structure.
Dependencies are inferred from the claim text.