Moving stage device in exposure apparatus

An exposure apparatus, comprising:

• a movable stage;
• a magnetic driving system for controlling a position of the stage;
• and
• a repulsive force generator for accelerating and/or decelerating the stage with respect to a movement direction, said repulsive force generator having (i) a set magnet including a plurality of magnets disposed along a direction orthogonal or substantially orthogonal to the movement direction, with a spacing therebetween while different poles of them are opposed to each other, and (ii) an insert magnet to be mountably and demountably inserted into the spacing and being disposed with respect to the set magnet so that the same poles are opposed to each other,
• wherein the amount of insertion of the insert magnet into the spacing is changeable in accordance with dose in exposure with respect to a substrate to be placed on the stage.

An exposure apparatus, comprising:

• a movable stage;
• a magnetic driving system for controlling a position of the stage;
• and
• a repulsive force generator for accelerating and/or decelerating the stage with respect to a movement direction, said repulsive force generator having (i) a set magnet including a plurality of magnets disposed along a direction orthogonal or substantially orthogonal to the movement direction, with a spacing therebetween while different poles of them are opposed to each other, and (ii) an insert magnet to be mountably and demountably inserted into the spacing and being disposed with respect to the set magnet so that the same poles are opposed to each other,
• wherein a relative position of the set magnet and the insert magnet is changeable in accordance with an exposure region of a substrate to be placed on the stage.

An exposure apparatus, comprising:

• a movable stage for holding thereon a substrate to be exposed;
• a magnetic driving system for controlling a position of the stage;
• and
• a repulsive force generator for accelerating and/or decelerating the stage with respect to a movement direction, said repulsive force generator having (i) a set magnet including a plurality of magnets disposed along a direction orthogonal or substantially orthogonal to the movement direction, with a spacing therebetween while different poles of them are opposed to each other, and (ii) an insert magnet to be mountably and demountably inserted into the spacing and being disposed with respect to the set magnet so that the same poles are opposed to each other.