System and method for holding a device with minimal deformation

A stage assembly that holds a device, the stage assembly comprising:

• a stage base;
• a device table being movable relative to the stage base along a first axis and along a second axis that is orthogonal to the first axis;
• a carrier coupled to the device table and movable relative to the device table;
• a device holder that retains the device;
• a holder connector assembly that connects the device holder to the carrier so that deformation of the carrier does not result in deformation of the device holder;
• and
• a holder damper assembly connected to at least one of the device holder and the carrier, the holder damper damping vibration between the device holder and the carrier.

A stage assembly that holds a device, the stage assembly comprising:

• a device table;
• a carrier that is coupled to the device table, the carrier rotating relative to the device table at least approximately five degrees between a first position and a second position;
• a device holder that retains the device;
• and
• a holder connector assembly that directly connects the device holder to the carrier, the holder connector assembly including a flexure.

A stage assembly that holds a device, the stage assembly comprising:

• a device table that is movable along a first axis and along a second axis that is orthogonal to the first axis;
• a carrier that is coupled to the device table and moves relative to the device table;
• a device holder that retains the device;
• and
• a holder connector assembly that directly connects the device holder to the carrier, the holder connector assembly including a fluid bearing.

A method for making a stage assembly that holds a device, the method comprising the steps of:

• providing a stage base;
• providing a device table that is movable along a first axis and along a second axis that is orthogonal to the first axis relative to the stage base;
• connecting a carrier to the device table, the carrier being movable relative to the device table;
• and
• connecting a device holder that retains the device to the carrier so that deformation of the carrier does not result in deformation of the device holder.

A stage assembly that holds a device, the stage assembly comprising:

• a stage base;
• a device table that is movable relative to the stage base along a first axis and along a second axis that is orthogonal to the first axis;
• a device holder that retains the device, the device holder being coupled to the device table, the device holder rotating relative to the device table at least approximately five degrees;
• and
• a holder damper assembly for damping vibration between the device holder and the device table.