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US 6,888,106 B2Granted
Ceramic heater
AssigneeIbiden Co., Ltd.
InventorYasuji Hiramatsu
Life of this patent
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Abstract
A ceramic heater making it possible to prevent a short circuit in its resistance heating element and heat a semiconductor wafer evenly. The ceramic beater includes a ceramic substrate, an insulating layer having volume resistivity higher than that of the ceramic substrate, being formed on at least a part of the ceramic substrate, and a resistance heating element formed on the insulating layer.
Claims12
A ceramic heater comprising:
- a ceramic substrate comprising a heating face configured to heat a wafer;
- an insulating layer having a thickness of between 0.1 and 1000 μm and a volume resistivity higher than that of said ceramic substrate, and disposed on a surface of said ceramic substrate;
- and
- a resistance heating element disposed on an opposite side of the heating face and disposed on said insulating layer.
1 more element
A ceramic heater comprising;
- a ceramic substrate comprising a heating face, the ceramic substrate warned in one direction;
- a supporting pin disposed in the heating face;
- and
- a resistance heating element disposed on a surface of said ceramic substrate;
- and disposed on an opposite side of the heating face.
2 more elements
Dependencies are inferred from the claim text.