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US 6,887,648 B2Granted
Antireflective coating compositions
AssigneeShipley Company, L.L.C.
InventorsEdward K. Pavelchek, Peter Trefonas, III
Life of this patent
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Abstract
Antireflective compositions are provided that contain an ionic thermal acid generator material. Use of such a thermal acid generator material can significantly increase the shelf life of solutions of antireflective compositions in protic media. Antireflective compositions of the invention can be effectively used at a variety of wavelengths used to expose an overcoated photoresist layer, including 248 nm and 193 nm.
Claims7
An antireflective composition comprising:
- a resin and an ionic thermal acid generator that comprises 1) a sulfonate having an optionally substituted phenyl substituent or 2) a sulfonate having an optionally substituted anthracene substituent.
Dependencies are inferred from the claim text.