Radiation-patterning tool

A radiation-patterning tool configured to be utilized to print a pair of structures in a radiation-sensitive material as radiation is passed through the radiation-patterning tool and onto the radiation-sensitive material;

• the structures being separated from one another on the radiation-sensitive material by a distance of less than or equal to a wavelength of the radiation utilized to print the structures;
• the tool comprising:
• two separate and discrete features, one of the two features corresponding to one of the structures of the pair of structures and the other of the two features corresponding to the other structure of the pair of structures;
• at least one element between the features which is at least partially transparent to the radiation passed through the radiation-patterning tool but does not correspond to a discrete structure printed in the radiation-sensitive material;
• the element modifying at least one of the structures printed from the pair of features;
• wherein the element is a rim shifter contacting both of the two features;
• and
• wherein the element joins to other rim shifters along edges of the features so that the edges of both features are entirely in contact with rim shifters.

A radiation-patterning tool configured to be utilized to print a pair of structures in a radiation-sensitive material as radiation is passed through the radiation-patterning tool and onto the radiation-sensitive material;

• the structures being separated from one another on the radiation-sensitive material by a distance of less than or equal to a wavelength of the radiation utilized to print the structures;
• the tool comprising:
• two separate and discrete features, one of the two features corresponding to one of the structures of the pair of structures and the other of the two features corresponding to the other structure of the pair of structures;
• at least one element between the features which is at least partially transparent to the radiation passed through the radiation-patterning tool but does not correspond to a discrete structure printed in the radiation-sensitive material;
• the element modifying at least one of the structures printed from the pair of features;
• wherein the two features are part of a linear expanse of a plurality of features;
• wherein the element is part of a linear expanse of elements arranged between the features of the linear expanse of features;
• wherein the elements are rim shifters contacting the features adjacent the elements;
• and
• wherein the elements join to other rim shifters along edges of the features so that the edges of all of the features of the linear expanse are entirely in contact with rim shifters.