Reduced friction lift pin
AssigneeApplied Materials, Inc.
InventorsDavid T. Or, Keith K. Koai, Hiroyuki Takahama, Takahiro Ito, Koji Ota, Hiroshi Sato
Life of this patent
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Abstract
A substrate support is provided that features a lift pin having at least one larger diameter shoulder section that forms a relief region between the lift pin and a guide hole disposed through a substrate support. The shoulder section minimizes contact between the substrate support and lift pin guide hole, thereby reducing pin scratching, particle generation, component wear, and increasing the useful life of the pin. In another embodiment, a flat-bottom tip is provided to promote self-standing of the lift pin, reducing pin tilting or leaning of the lift pin within the guide hole.
Claims12
An apparatus for selectively spacing a substrate from a substrate support, comprising:
- a substrate support;
- a lift pin guide hole disposed through the substrate support;
- a lift pin shaft;
- a first shoulder section circumscribing a portion of the lift pin shaft and disposed movably within the lift pin guide hole, the first shoulder section providing a bearing surface;
- a flared head disposed against the first shoulder section;
- and
- a lift plate disposed proximate an end of the lift pin shaft.
An apparatus for selectively spacing a substrate from a substrate support, comprising:
- a pin shaft having a first section having a larger diameter than a second section, the first section providing a bearing surface;
- a flared end adapted to support the substrate thereon and coupled to the first section of the pin shaft;
- and
- a substrate support having a hole formed therethrough, the hole having the first section of the pin shaft movably disposed therein.
Dependencies are inferred from the claim text.